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Tribological investigation for next generation polymeric micro systems

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Figure

Figure 1.1 Schematic showing contact pressures and length scales of tribometer families
Figure 2.1 Steps in a typical bulk micromachining process (Adams, 2010)
Figure 2.3 Schematic view of the LIGA process (Yoshihiro Hirata, 2003)
Table 2.1 The values of materials parameters with pressure (adapted from Kragelsky, 1982)
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