SUSS MICROTEC HALF YEAR FIGURES August 7, 2014

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SUSS MICROTEC – HALF YEAR FIGURES 2014

August 7, 2014

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DISCLAIMER

This presentation contains forward-looking statements relating to the business, financial performance and earnings of SUSS MicroTec AG and its subsidiaries and associates. Forward-looking statements are based on current plans, estimates, projections and expectations and are therefore subject to risks and uncertainties, most of which are difficult to estimate and which in general are beyond the

control of SUSS MicroTec AG. Consequently, actual developments as well as actual earnings and

performance may differ materially from those which explicitly or implicitly assumed in the forward-looking statements. SUSS MicroTec AG does not intend or accept any obligation to publish updates of these forward-looking statements.

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I. Highlights Q2 2014

II. Financials

HIGHLIGHTS Q2 2014

4 SUSS MicroTec Investor Presentation

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Market introduction of two new Mask Aligners “MA200 Gen3” and “MA12”

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Delivery of enhanced Coater/Developer system for Fan-Out Wafer

Level-Packaging applications for substrate sizes above 300 mm

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A major OSAT purchases the new DSC300 Gen2 and qualifies it for volume

production

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Successful technology forum for NanoImprint in Grenoble

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I. Highlights Q2 2014

II. Financials

SEGMENTS, ORDER ENTRY AND SALES H1 2014

SUSS MicroTec Investor Presentation 6

Frontend Mid- and Backend

Photomask

Equipment

Lithography

Substrate Bonder

Photomask Cleaning Equipment Exposure Systems Coaters and Developers Wafer Bonding Equipment Laser Processing Equipment Temporary Wafer Bonding Permanent Wafer Bonding Projection Lithography Proximity Exposure (+Nano Imprint) 193i Cleaning Equipment EUV Cleaning Equipment

H1 Order Entry: 9.1 € million H1 Sales: 7.8 € million

H1 EBIT: 1.6 € million

H1 Order Entry: 42.8 € million H1 Sales: 43.8 € million

H1 EBIT: 4.2 € million

H1 Order Entry: 6.5 € million H1 Sales: 15.2 € million H1 EBIT: -1.2 € million

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ORDER ENTRY AND SALES BY SEGMENT AND REGION

Sales by Region

Sales by Segment

Order Entry by Region

Order Entry by Segment

70% 15% 11% 4% H1 2014: 61.2 € million 32% 14% 10% 44% 63% 11% 22% 34% H1 2014: 69.4 € million H1 2014: 69.4 € million 23% 15% 6% 56% H1 2014: 61.2 € million

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36.2 25.0 29.1 34.3 36.7 34.9 40.2 36.6 41.4 39.0 24.5 38.2 32.1 48.3 49.5 56.9 50.6 32.3 32.4 24.1 23.9 15.9 77.7 71.4 85.7 59.2 57.7 57.6 57.0 75.4 89.9 108.0 116.1 130.5 109.8 103.5 83.7 99.8 107.2 102.4 86.5 91.5 102.5 97.6 0 25 50 75 100 125 150

LONG TERM BUSINESS DEVELOPMENT BY QUARTER

SUSS MicroTec Investor Presentation 8 Order Entry in € million 2013: € 135 million Order Backlog in € million Sales in € million 2013: € 135 million 30.4 39. 40.5 38.9 45.9 52.6 32.0 42.5 37.0 37.7 21.9 33.3 23.5 24.6 22.5 44.9 31.2 36.3 40.7 55.6 30.1 24.9 0 25 50 75 Q 1 /2 0 0 9 Q 2 /2 0 0 9 Q 3 /2 0 0 9 Q 4 /2 0 0 9 Q 1 /2 0 1 0 Q 2 /2 0 1 0 Q 3 /2 0 1 0 Q 4 /2 0 1 0 Q 1 /2 0 1 1 Q 2 /2 0 1 1 Q 3 /2 0 1 1 Q 4 /2 0 1 1 Q 1 /2 0 1 2 Q 2 /2 0 1 2 Q 3 /2 0 1 2 Q 4 /2 0 1 2 Q 1 /2 0 1 3 Q 2 /2 0 1 3 Q 3 /2 0 1 3 Q 4 /2 0 1 3 Q 1 /2 0 1 4 Q 2 2 0 1 4 0

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1.9 1.5 -6.2 1.8 -11.7 -3.3 8.6 1.6 1.6 0.0 3.9 4.1 5.9 3.5 1.5 1.1 -0.8 1.0 8.1 -0.1 5.0 2.5

EBIT, FREE CASH FLOW AND NET CASH DEVELOPMENT

* one-off effect from refocusing the product line permanent bonding

Net Cash in € million Free Cash Flow

in € million 2013: € 4.1 million EBIT in € million 2013: -19.4 million 33.3 31.5 35.7 21.9 19.5 25.1 32.3 30.7 30.1 38.5 42.0 40.1 35.5 35.1 34.6 23.5 25.6 18.4 15.3 13.8 11.6 11.0 Q1/ 2009 Q2/ 2009 Q3/ 2009 Q4/ 2009 Q1/ 2010 Q2/ 2010 Q3/ 2010 Q4/ 2010 Q1/ 2011 Q2/ 2011 Q3/ 2011 Q4/ 2011 Q1/ 2012 Q2/ 2012 Q3/ 2012 Q4/ 2012 Q1/ 2013 Q2/ 2013 Q3/ 2013 Q4/ 2013 Q1/ 2014 Q2/ 2014 1.8 -4.2 14.0 2.5 -5.2 -7.2 1.7 0.9 -7.4 0.3 1.5 4.5 10.3 7.3 3.3 1.7 2.1 1.9 -0.3 -1.3 -2.2 -2.2 -10 -5 0 5 10 15 20 *-6.0 *-7.2

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KEY FINANCIALS

* incl. stock of interest-bearing securities

** before consideration of purchased interest-bearing securities

in € million Q2 2014 Q2 2013 in % H1 2014 H1 2013 Order Intake 36.2 36.7 -1.4% 61.2 71.6 Order Backlog 6/30 -- -- -- 77.7 102.5 Revenue 30.4 24.9 +22.1% 69.4 55.0 EBIT 1.9 -11.7 -- 3.4 -15.0 EBIT in % of Sales 6.3% -47,0% -- 4.9% -27.3% EBIT (adjusted) -- -5.7 -- -- -9.0 EBIT (adjusted) in % of Sales -- -22.8% -- -- -16.4%

Earnings after tax 0.9 -9.1 -- 2.0 -11.6

EPS in € 0.05 -0.48 -- 0.11 -0.61

Free Cash Flow* 1.8 -5.2 -- -2.4 -12.4

Net Cash** -- -- -- 33.3 19.5

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Mask Aligner and Coaters /Developers

Current and expected sales level around 80 – 90 € million per year

SUSS MicroTec Investor Presentation

Lithography

OUTLOOK PER PRODUCT LINE

Substrate Bonders Photomask Equipment

UV Projection Scanners, and Laser Ablation Steppers:

Several customer installations; the products are in an early market introduction phase Current annual sales at around 10 € million

Stable sales level at around € 20 million per year

Permanent Bonding

After discontinuation of cluster systems reduced sales level vs. previous years Temporary Bonding

3D integration is a significant growth opportunity with volume ramp difficult to predict Expected sales level of the division: 15 – 20 € million

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OUTLOOK

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FY 2014: Sales: 135 to 145 € million EBIT: slightly positive

SUSS MicroTec Investor Presentation

Improved Guidance

Q3 2014: Order Intake: 25 - 35 € million Q4 2014: Order Intake: 30 - 40 € million Outlook

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SÜSS MicroTec AG Schleissheimer Str. 90 85748 Garching

www.

suss

.com

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SHARE PRICE DEVELOPMENT AND MAJOR HOLDERS

(Price of the SUSS MicroTec Share at January 2, 2014: 6.38€ )

Major Shareholders: Credit Suisse 3.35% BlackRock 3.23% Henderson 5.13% Schroders 3.10% Vanguard 3.20% Union Invest 3.07 Dimensional 3.01% Baillie Gifford 3.00%

Average daily trading volume January 2013 – July 2014: ~ 82,000

90 100 110 120 130 140 150

Jan. Feb. M rz. A pr. M ai. Jun. Jul. A ug.