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Micro Raman Mapping of 3C SiC Thin Films Grown by Solid–Gas Phase Epitaxy on Si (111)

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Figure

Fig. 1 a SEM image of sample
Fig. 2 a Raman spectra fromSiC layer grown on Si substratemeasured at the void area andoutside the void area
Fig. 3 a Top view of the sample of 3C-SiC obtained by opticalmicroscopy (scale in lm), the red arrow shows the mapping line.Results of Raman line mapping for b peak position, c linewidth and

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