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Methods for Detection of Subsurface Damage: A Review

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Figure

Figure 1 Schematics of subsurface damage induced in a scratching process [18]
Figure 2 Schematics of the traditional taper polishing method [1]
Figure 3 Schematics of bonded‑interface technique [40]
Figure 4 Etching rate vs. etching time for the silicon wafers ground by #2,000 diamond wheel [2]
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