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ITO nanoparticles reused from ITO scraps and their applications to sputtering target for transparent conductive electrode layer

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Figure

Fig. 1 a BET SSA and b average particle size of ITO‑NPs dependent on heat‑treatment temperature
Fig. 3 X‑ray diffracted patterns of ITO‑NPs heat‑treated at 980 °C
Fig. 4 a Photograph and b SEM observation of sputtering target made of reused ITO‑NPs heat‑treated at 980 °C
Fig. 5 FESEM observations of ITO layers by sputtering with reused ITO target dependent on film thickness; a 130 nm, b 180 nm, c 250 nm, and d350 nm
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