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Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition

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Figure

Fig. 1 The structure diagram of the AZO films
Fig. 3 XRD patterns of samples grown on Si substrates after annealing
Fig. 4 AFM 3D images of pure ZnO and AZO thin films grown on Si substrates
Fig. 5 The optical constants of samples grown on Si substrates: a the refractive index n
+3

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