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Modeling of Silicon Vapor Phase Epitaxy Using Stefan Maxwell Formalism

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Figure

Table 1Independent Reaction and Phase Equilibria in Si-Cl-H system.
Table 2Three-term, non-linear form free energy equations for the nineequilibria in the Si-Cl-H system (cal/mole with T in Kelvins).
Table 3Species occurring in Si-Cl-H system and designations.
Fig. 2. The integration produces the following result for theflux,��
+3

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