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Optimization of electrode geometry and piezoelectric layer thickness of a deformable mirror

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Figure

Figure 2. Geometry of the finite element method (FEM) modelHoneycomb structure of gold electrodes is deposited on the bot-tom of the PZT layer
Figure 3. Graphical presentation of the deformable mirror displacement. One othe mirror, it is shown using the iso-surfaces and slices
Figure 4. Graphical presentation of the deformable mirror displacement. All honeycomb electrodes are connected to the electricpotential of 200 V
Figure 7. Dependences of the maximal values of the mirror de-flection on the honeycomb electrode distance d (0 − 3 mm)

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