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Structural and optical characterization of pure Si rich nitride thin films

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Figure

Figure 3 shows the evolution of the refractive index of
Figure 5 shows the evolution of the FTIR spectra of SiNxthin films measured with the two incidence angles
Figure 5 Evolution of the FTIR spectra of SiNx with therefractive index. The FTIR spectra of the layers deposited by theN2-reactive (black) and the co-sputtering (gray) methods weremeasured with a normal incidence (a) and with an incidence angleof 65° (b).
Figure 7 shows the evolution of the Raman spectra of SiNxthat the condensation of the excess of Si in small crystal-line Si-np during the annealing at 1100°C occurs but onlyin thin films having a refractive index higher than 2.5transverse acoustic (2TA) ph
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