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Fine Sized Etching of Flexible Substrates Using Nano Particle Deposition System (NPDS)

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Figure

Fig. 2CFD analysis results based on the experimental conditions shownin Table 1.13)
Table 2Vickers hardness measurement for polymer substrate (200 gf ofload).
Fig. 3Surface morphology measured by an optical microscope and alpha-step. (a) Optical image of etched pattern on ITO substrate atSoD ¼ 300 mm (Run #1 in Table 1); (b) and (c) Optical image and the surface profile of etched pattern on ITO substrate at SoD ¼
Fig. 4(a) Relationship between the average value of etching depth (andheight) and SoD for SU-8 and ITO substrates, and (b) SoD dependence onthe size of the impact area for SU-8 and ITO substrates.

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