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Fe Pd Ferromagnetic Shape Memory Alloy Thin Films Made By Dual Source DC Magnetron Sputtering*

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Figure

Fig. 2Pd contents in as-deposited films as a function of the dc powerapplied for Pd target
Fig. 3X-ray diffraction patterns of as-deposited Fe–Pd films with variousPd contents. The vertical axis is shown in log scale.
Fig. 6Surface morphology of annealed films with various thickness andPd contents.
Fig. 9Martensitic transformation temperature (Ms) of Fe–Pd alloy filmswith various thickness as a function of Pd content.
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