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(1)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Advanced Packaging Interconnect Trends

and Technology Developments

(2)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Advanced Packaging Market Share

ƒ

Advanced Packaging includes BGAs and CSPs, WLPs,

and flip chip

ƒ

Growing in unit volume and dollar value

Source: IC Insights and TechSearch International, Inc.

28 billion WB

13.8 billion FC & WLP

41 billion WB

(3)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Drivers for Advanced Packaging Growth

ƒ

Mobile phones

ƒ More than one billion mobile phones expected to ship in 2007

ƒ Mobile phones contain an average 15 CSPs, including SiP

ƒ SiP for digital baseband section, transceiver section, RF section, camera module

ƒ Drives volumes for stacked die packages and system-in-package (SiP)

ƒ

Portable consumer products (digital camcorders, cameras)

ƒ Digital cameras/camcorders, MP3 players, DVD players, etc.

ƒ More than 100 million of Apple’s iPods shipped since 2002

ƒ Thin is in…..drives new package technology developments

ƒ

Personal computers

ƒ PCs highest volume application for PBGAs

ƒ

Game machines

(4)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Sony’s PS3 with BGAs and CSPs

ƒ More than 20 BGAs and CSPs

ƒ Leadframe parts including QFPs

(5)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Apple’s iPod Nano

ƒ At least 7 CSPs on the main board, all wire bonded

ƒ CSPs are underfilled

ƒ 4 Gbit memory package in a TSOP, mounted on a daughter card 2 Gbit memory mounted directly on the board

Source: Adapted from Impress Corporation

(6)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

① ③ ④ ⑤ ② 1.20 0.80 1.20 1.0 1.20 PKG Thickness (mm) 376 90 624 257 109 PIN COUNT 10.0x11.0 11.0x13.0 13.0x13.0 10.0x10.0 11.5x13.0 PKG SIZE (mm) 0.50 FBGA(L) ③ 0.50 0.80 0.50 0.80 Terminal Pitch (mm) FBGA(L) FBGA(L) FBGA(L) FBGA(L) PKG TYPE ⑤ ④ ② ①

Panasonic P901iTV

Source: TPSS

(7)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Apple’s iPhone

ƒ More than 700,000 iPhones sold during the first weekend of product introduction

ƒ Many wire bonded parts, a few WLPs Source: http://www.embedded.com

(8)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Apple’s iPhone

QuickTime?and a TIFF (LZW) decompressor are needed to see this picture.

(9)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Apple’s iPhone

Source: http://www.embedded.com

ƒContains stacked die and PoP

ƒSamsung PoP with processor in the

bottom package and two 512 Mbit SRAM die in the top stacked die package

(10)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Stacked Die CSP Package Growth

ƒ Mobile phone is main growth driver

ƒ Also found in digital cameras and camcorders

ƒ CAGR 9.8%

(11)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Stacked Die CSPs

ƒ 16 die stack demonstrated, 4-5 die per package common, typically 2 die per package in today’s products

ƒ Typically wire bond, but some gold stud bump (using ball bonder)

Source: Intel

Source: TI

(12)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Fujitsu F903i Mobile Phone

Renesas G1 processor

Spansion Memory

ƒ14 CSPs

ƒCSPs include FBGA, QFN, and WLPs

ƒRenesas processor in a stacked die package ƒStacked die packages

ƒFour MCMs and other LGAs ƒPackages typically wire bond

ƒCMOS image sensor camera module with 54 wire bonds

3.2MP camera module

(13)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Spansion’s Stacked Die in Fujitsu’s F903i

ƒ

Two die stacked package

ƒ

Hundreds of wire bonds per CSP

Marking 98WS768P0GFA006 Body Size 9x13mm Ball Pitch 0.80mm Substrate THK 0.25mm Mold Cap THK 0.79mm PKG THK except Ball 1.04mm Bonding Method Wire Bonding Die Configuration 2 Dies Stacked Die size (Top die) 6.4x7.4x0.1mm Die size (Middle die) 9.6x5.3x0.09mm Die size (Bottom die) 11.7x6.9x0.09mm

(14)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Stacked Die in Fujitsu’s F903i

ƒ SDRAM on top of 4 die stack ƒ Two DDR2 memory die mounted on Renesas G1 processor ƒ Total of 207 wire bonds in memory stack 512Mb DDR2 BP size: 137x71um BP pitch: 82um Ball size: 37umφ # of pads: 105 pads 128Mb M-SDRAM BP size: 137x57umum 82pitch: 81um Ball size: 37umφ # of pads: 102 pads 512Mb DDR2 BP size: 137x71um BP pitch: 82um Ball size: 37umφ # of pads: 105 pads Source: TPSS

(15)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Stacked Die SiP in Fujitsu’s F903i

0.278mm 0.081mm 0.026mm 0.083mm 0.026mm 0.105mm 0.148mm 0.055mm 0.027mm 0.816mm 0.377mm 0.021mm 0.167mm 0.026mm 128Mb M-SDRAM 512Mb DDR2 #1 512Mb DDR2 #2 G1 processor DAF 1 DAF2 DAF3 Underfill Source: TPSS

(16)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Spansion’s Stacked Die in Fujitsu’s F903i

0.375mm 0.097mm 0.090mm 0.094mm 0.029mm 0.030mm 0.050mm 0.7400.2530.996mm 0.024mm 0.036mm 0.014mm 0.057mm 0.013mm 0.033mm 0.027mm DAF Insulator Source: TPSS

(17)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Samsung’s X818 Phone with Stacked Die CSP

ƒ Mobile phone for China market

ƒ Contains 18 CSPs plus several MCMs ƒ Contains stacked die CSPs

FBGA(L) 167pin 10.5x14.0x1.40t P=0.80 W/B 4 chips FBGA(L)224pin 10.0x10.0x1.20t P=0.50 W/B 1chip FBGA(L) 25pin 3.0x3.0x0.80t P=0.50 W/B 1chip Source: TPSS

(18)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Samsung’s X818 Phone with Stacked Die CSP

FBGA(L)100pin 8.0x8.0x1.20t P=0.80

W/B 2 chips

(19)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Spansion’s Roadmap for Die Stacking

ƒ Number of die per stack has increased over time, and with it an increase in the number of wires

ƒ Die thickness has decreased

ƒ At the same time, pitch has decreased

(20)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Stacked Die Packaging Trends

Stacked Die Packaging Trends

ƒ

Thinner packages

ƒ From 1.2, 1.4 mm to below 1 mm.

ƒ

Higher level stacking

ƒ From 2, 3, 4 level to 5, 6, 7 level stack

ƒ

Multi-function chips

ƒ From flash and SRAM to including ASIC and logic

ƒ Thinner die

ƒ Lower loop height

ƒ Control of impact when bonding on overhang

ƒ Longer wire length ƒ Looping sway control ƒ Thermal control

(21)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Stacked Die Challenges

ƒ Wafer thinning/die attach

ƒ Thickness of 75 µm in volume production today

ƒ Development work with thicknesses of 50 µm in development for both 8-inch and 12-inch wafers

ƒ Mechanical issues with dicing (handling, chipping, flaking)

ƒ Wire bonding

ƒ Low loop heights, reverse bonding ƒ Smaller diameter wire, longer spans ƒ Die to die wire bonding can be complex

ƒ Die overhang (spacers required for same size die)

ƒ Material selection

ƒ Substrates need to be thin, but rigid ƒ Mold compound selection

ƒ Thermal performance

ƒ Business issues if logic + memory

ƒ Logistics

ƒ Testing (KGD) ƒ Yield

(22)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Package on Package (PoP) in Panasonic’s

P902i

ƒ Individual packages stacked on top of each other, typically during board level assembly

ƒ At least 10 major OEMs in handset and digital still camera market adoption PoP

ƒ TechSearch estimates 67 million PoPs were shipped in 2006 Source: TPSS

(23)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Amkor’s PoP Options

(24)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

SiP Growth

ƒ SiP is a functional system or subsystem assembled into a single package

ƒ Utilizes combination of advanced packaging such as bare die (wire bond or flip chip), CSP, stacked package, stacked die

ƒ CAGR of 15.9%

Source: TechSearch International, Inc.

ƒCell phones ƒPDAs ƒMP3 players ƒCameras ƒComputers ƒAutomotive ƒMedical ƒIndustrial ƒDefense ƒAerospace

(25)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

ASE Examples of SiP for Mobile RF

ƒExamples of PA (with antenna and switch), Transceiver, Front-End Module, DCR, SPR, BT, WLAN

ƒModule package size ranges from 3mm x 3mm to 13mm x 13mm

ƒPackage thickness from 0.85 to 1.8 mm

ƒDie including silicon (min. 75µm thick), SiGe, GaAs HBT, pHEPT, CMOS, SAW/BAW filter

ƒFine pitch wire bond 45 µm bond pad pitch

Note: DCR (Direct Conversion Receiver), SPR (Single Package radio), pHEMT (Pseudo-morphic High Electron Mobility Transistor), HBT (Hetero-junction Bipolar Transistor), CMOS (Complementary meta-Oxide Semiconductor)

(26)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

SiP Configurations in Mobile Phones

ƒ

RF section

ƒ

Baseband section

ƒ

Camera module

ƒ

PA module

Source: TPSS Source: Amkor Source: Skyworks

(27)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Future 3D TSV Camera Modules with Gold

Stud Bump

Au stud bump

RIE or Laser Drill Cu plated via

Al wiring

Stud bump made of Au wire

Stacking cross section

Source: Hitachi

(28)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Wire Bonding Market Share for IC Packaging

ƒ

Wire bonding remains the “mainstay” of the industry

ƒ

Bumped die includes flip chip, wafer level packages, gold bump

driver ICs

(29)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Why Doesn’t Flip Chip Dominate the

Interconnect World?

ƒ Flip Chip is used where needed, for performance or pad limited designs mostly, but in some cases form factor

ƒ Continued advances in wire bond technology

ƒ Flip chip substrates are typically more expensive than wire bond substrates

ƒ Wire bond designs typically routed in four layers

ƒ Flip chip substrates are more complex, route bumped die with fine pitch

ƒ Flip chip often requires build-up substrates with lower yield, more expensive material sets, greater complexity

Source: ASE

(30)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Why Doesn’t Flip Chip Dominate the

Interconnect World?

ƒ Many companies have found that flip chip assembly is typically more expensive than wire bond

ƒ Flip chip substrate shortage in 2005 increased substrate prices, with current overcapacity substrate prices are falling again

ƒ Intel has twice delayed the move from wire bond to flip chip for the ICH chipset (Southbridge), current delay shifts flip chip adoption out to 2009

ƒ Estimated assembly cost for wire bond vs. flip chip in large die size 17mm x 17mm found flip chip assembly was 30% more expensive than wire

(31)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Wire Bond Pitch Trends (actual production)

ƒ

Wire bond pitch in actual production has become finer and

finer over time, trend continues

(32)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Bond Pad Over Active I/O

ƒ LSI developed the industry’s first wire bond over active I/O technology (Pad on I/O™) for copper/low-k

ƒ Allows the extension of wire bond technology to deep submicron CMOS designs in 130nm and 90nm nodes that are typically pad limited

ƒ Placing wire bonds over the active I/O saves die area and does not affect metal routing and interconnect

(33)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

New Developments in Low Loop Height Wire

Bonding

ƒ Specially designed for stacked die applications

ƒ Highly accurate and consistent loop profiles

ƒ Improved loop linearity and stability

ƒ Higher bond test results

(34)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

ƒ Die to Die Bonding

65 µm bonding pad pitch Min. 55 µm bond pad open Min.

Wire Length

ASE’s Wire Bonding Capability

Max. Wire Length (MWL) Wire Diameter Bond Pad

Opening 3.8mm(150mil)< MWL ≦ 4mm(160mil) 30um(1.2mil) B.P.O.≧80(um) 3.5mm(140mil) < MWL ≦ 3.8mm(150mil) 28um(1.1mil) B.P.O.≧63(um) 3.3mm(130mil)< MWL ≦ 3.5mm(140mil) 25um(1.0mil) B.P.O.≧53(um)

3mm(120mil) < MWL ≦ 3.3mm(130mil) 23um(0.9mil) B.P.O.≧43(um) MWL ≦3mm(120mil) 20um(0.8mil) B.P.O.≧40(um)

(35)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

ASE’s Wire Bonding Capability

9 Forward bond-standard

Min. loop height : 75µm (20µm wire) Loop Height

9 Reverse bond

Min. loop height : 50µm (20µm wire) Loop Height

(36)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Microbonds X-Wire

™ Technology

ƒ

X-Wire™is a coated wire bond technology

ƒ Proprietary process developed to coat wire

ƒ

X-Wire™ allows greater design flexibility:

ƒ Relax tight wire bonding rules and corner pad rules

ƒ Relax loop profiling and wire connection violations

ƒ Allows crossing, touching wires and long wires

(37)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Conclusions

ƒ

Advanced packaging continues to grow in units and revenue

ƒ IC package subcontractors improve revenue growth with advanced package assembly

ƒ

Advanced packaging ≠ FC

ƒ

Wire bond accounts for 90% of IC packages shipped in 2006

ƒ

Advanced packaging includes BGAs, CSPs, flip chip, and wafer

level packages

ƒ Wire bond accounts for 67% of all advanced packages

ƒ Strong unit volume growth in a variety of packages including stacked die, SiP, BGA, and all types of CSPs

(38)

K&S Interconnect Technology Symposium

K&S Interconnect Technology Symposium

Company Copyright

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