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Pulsed DC reactive magnetron sputtering of aluminum nitride thin films

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Figure

Table 1-2. Thermal conductivity at room temperature for several adamantine crystals
Table 2-1.  Frequency and duty cycle of bipolar asymmetric pulsed DC power supply.
Table 2-3.  Experimental conditions for bipolar pulsed DC sputtering.
Figure 3-27.  Surface roughness (rms) of the AlN films grown on Si (100) with variations
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