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Gallium nitride materials - Progress, status, and potential roadblocks

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Figure

Fig. 1.Schematic of (a) LEO growth through a window in SiOand laterally over the mask
Fig. 3.Composite of cross-sectional TEM micrographs of a PEAlGaN film. Note the threading dislocations continue fromthe GaN stripes into the film.
Fig. 4.(a) Surface structure diagram defining the Ga-fluxis the active nitrogen flux that gives rise to growth)
Fig. 5.AFM images of GaN samples grown within the (a)(Ga fluxN-stable regime (Ga flux = 14.5 nm/min), (b) intermediate regime = 15.8 nm/min), and (c) Ga droplet regime (Ga flux18.2 nm/min)
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