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Conformal Coating by Liquid Route on Three- Dimensional Topology

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Figure

Figure 1. Cross-sectionnal SEM micrograph of typical trench profiles obtained in silicon cryoetching (see ref
Figure 2. Thermal analysis of LaNiO3 solution, glycerol and PEG. TcLNO = crystallisation temperature of LNO
Figure 3. Cross-sectionnal SEM micrograph of a LaNiO3 coating in trench with a 0.5M.
Figure 5. Cross-sectionnal SEM micrograph of (0.3M LNO solution + PEG ) coating with a viscosity value of 40 mPa·s
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