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Sol Gel Processed Indium Doped Zinc Oxide Thin Films and Their Electrical and Optical Properties

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Figure

Figure 3Three-dimentional AFM pictures of three ZnO samples and their two-dimentional projections are given in
Figure 3. AFM images for (a) pure zinc oxide; (b) 0.8 at.% In; and (c) 3 at.% In-doped zinc oxide
Table 1. Electrical properties and doping efficiency for the as deposited and vacuum annealed IZO films
Table 2. Dependence of the thicknesses and the refractive indices of the ZnO films on indium concentration and vacuum annealing treatment
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