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Influence of Oxygen to Argon Ratio on the Structural and Morphological Properties of Nb Doped SrTiO3 Epitaxial Films Grown by Reactive Ion Beam Sputter Deposition

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Academic year: 2020

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Figure

Figure 1. GIXRR spectrum of the STNO film grown on LAO substrate. The inset shows growth rate as a function of OMR
Figure 3. (a) HRXRD ωGIXRD 2−2θ scans around 002STNO; and (b) θχ scans around the 200STNO reflections of the STNO films grown at various OMRs
Figure 7. AFM topography images (1  1 μm2 scan area) of the STNO films grown at various OMRs: (a) 12.5%; (b) 25.0%; (c) 37.5%; and (d) 50.0%

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