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X ray Reciprocal Space Mapping of Graded Alx Ga1 − x N Films and Nanowires

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Figure

Fig. 1 Depth profiles of the Al composition (a) and the in-plane strain (b) of graded AlxGa1 − xN films
Fig. 3 The εSjj ð Þt (red solid curve) and εtotaljjð Þt (blue solid curve) profiles of graded AlxGa1 − xN NWs on a Si(111) and b GaN(0001) substrates with thebrown solid curves indicating the εfreejjð Þt profile
Fig. 4 Calculated 20ð�25Þ RSMs of coherently strained, graded AlxGa1 − xN films using the depth profiles of the out-of-plane lattice parametersshown in a where the blue line represents pseudomorphic growth and the redline partially relaxed growth
Fig. 5 ax The depth evolution of the out-of-plane lattice parameter, cNW(t), and the in-plane lattice parameter, aNW(t), (inset) of the graded AlxGa1 −N NWs grown “free standing” (brown), on GaN(0001) (blue), and on Si(111) (red)

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