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Three Dimensional Simulations with Fields and Particles in Software and Inflector Designs

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Figure

Figure 1. (a) Isotropic and (b) anisotropic etching-feature profiles at t = 0, t = 5 s, t = 10 s, t = 15 s
Figure 2. Electrons (EEDF, EADF) and ions (IEDF, IADF) energy and angular distribution functions
Figure 4. Mechanical drawing of the spiral inflector.

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