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Transmission electron microscopy and x ray diffraction investigation of the microstructure of nanoscale multilayer TiAlN/VN grown by unbalanced magnetron deposition

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Figure

FIG. 1. Schematic dcross-section of the detwo pairs of TiAl andcathode was equippemagnetic coil andmagnetron
FIG 2 AFM micrographs showing the surface morphology of TiAlN/VN coatings grown at (a) Ub= -75V, (b) Ub = -95V, (c) Ub = -125V
FIG 4 Texture factors T*{100}, T*{110} and T*{111} of TiAlN/VN coatings grown at substrate negative bias voltage between -75V and -150V
FIG 6  Plane-view TEM BF micrographs of TiAlN/VN grown at (a) Ub = -75V, (b) Ub = -95V
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