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Remote Plasma Maintenance in Low Pressure Discharges with an External Magnetic Field

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Figure

Table 1. Processes involved in the charged particle balance and the balance of the hydrogen atoms
Figure 1. Configuration of the plasma volume (a) and illus-tration of the z-variation of the filter field and of the rf power input (b)
Figure 3. Comparison of the axial variation (at xelectron temperature (a) and density (b) for different values of  = 0) of the z0, as marked on the figure; p = 4 mTorr
Figure 5. Arrow plot presentation of the electron flux (a) and of the electron energy flux (b) in the (x-z)-plane; z p4 mTorr
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