RF MEMS on silicon
Anti-Stiction And Self-Recovery Active Mechanisms For High Reliability RF-MEMS Switches
... few MEMS switch samples have been tested under different stress and operation ...the silicon oxide ...the RF in/out multimetal contact areas, that does not allow any direct contact between the ...
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Design and Simulation of RF MEMS Switches
... Previously RF switching has been implemented by using p-i-n diodes and GaAs MESFET’s in the form of junction field-effect transistor (JFET) based semiconductor ...Recently, RF microelectromechanical switches ...
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Novel Design Solutions for High Reliability RF MEMS Switches
... on silicon and ...of silicon there is only appreciable temperature rise, whose maximum is at the center of the ...W RF power inputs at 15 ...on silicon and the difference increases with ...
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Design and Fabrication of RF-MEMS Switch for V-Band Reconfigurable Application
... 3. TECHNOLOGY FOR MEMS IMPLEMENTATION Technologies on silicon offer an interest with respect to cost reduction and the integration of active functions. Nevertheless their major drawback is that levels of ...
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A New RF MEMS Capacitive Switch for K-Band Application
... novel RF MEMS capacitive shunt switch, which is applied in K- band (18 ∼ ...the RF MEMS switch is achieved by discontinuous coplanar waveguide (DCPW) ...proposed MEMS switch is ...
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RF MEMS Design and Fabrication Process for Communication
... a RF MEMS switch was designed by the initialization of parameters like size, height, width, length, and the ...a silicon and air as silicon was the semiconducting ...The RF switch was ...
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DESIGN AND ANALYSIS OF A 3-BIT RF MEMS TUNABLE CAPACITOR
... The aim of this work was to create a high-Q tunable capacitor of a relatively simple planar structure with a low activation voltage. This paper presents the designed and fabricated metal RF MEMS tunable ...
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Design and Analysis of Shunt Configuration Based RF MEMS Switch
... consumption. RF MEMS switches are the alternative to replace conventional switches in communication ...using MEMS (Micro Electromechanical systems) technology. Among all MEMS devices switches ...
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Simulation of RF-MEMS Bio Implantable Sensor for Orthopedic Application
... The design of sensor consist of silicon as substrate and Au as metal layer as they are biocompatible they can be used for implantation. The bio-sensor is designed using IntelliSuite software. IntelliSuite is a ...
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Comparison of Packaging Technologies for RF MEMS Switch
... on silicon substrate with SWS as 55-90-55 µm has 50 ohm ...with silicon cap results in passing fringing field lines through silicon cap (ε = 12), rather than air (ε = 1) as shown in Figure ...through ...
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The Analysis and Simulation of RF Micro Cantilever Switch with Low Actuation Voltage Using COMSOL Multiphysics Software
... all MEMS devices. MEMS cantilevers are usually fabricated using materials like silicon (Si), silicon nitride ...provided. MEMS cantilever has number of noteworthy applications [4], ...
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Design of RF MEMS based switch matrix for space applications
... the RF line design, every horizontal and vertical transition is optimized to have minimum return loss (RL) and insertion loss ...and RF pin con- nectors on the housing during LTCC board ...
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MEMS based radar sensor for automotive collision avoidance
... state-of-the-art automotive radars, MEMS based radio frequency (RF) components such as Rotman lens, RF switches, antennas, filters, etc. can be used to realize a high performance small[r] ...
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The Image Phase Approach for the Design of RF MEMS Shunt Switches
... In this paper, it has been described as a novel approach to analytically design the transmission line sections used in RF MEMS shunt switches to have a matched component in the “ON” state. The method is ...
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RF MEMS Based Reconfigurable Rectangular Slotted Self Similar Antenna
... of RF MEMS switches is used to perform the frequency reconfiguration in three bands namely Ku-band, K-band and ...Ka-band. RF MEMS switches offer low loss and high ...
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CMOS Silicon on Sapphire RF Tunable Matching Networks
... Switches used in digital and low-frequency applications are usually characterized by their switching time and input ca- pacitances. In RF applications, however, these metrics may not be adequate to describe their ...
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Design and Simulation of an RF-MEMS Switch and analysis of its Electromagnetic aspect in realtion to stress
... Now when the switch is in off-state, the value of reflection coefficient should be greater than -10 dB because at the off-state, switch is not in the working conditions. Maximum power which is incident to the switch gets ...
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Impact of Environmental Conditions on the Contact Physics of Gold Contact RF Microelectromechanical Systems (MEMS) Switches.
... contacting RF MEMS switches, gold is the contact material of choice, and while it does not oxidize, it still adsorbs hydrocarbons and water to its surface in ambient air ...among RF MEMS ...
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Characteristic and analysis of silicon germanium material as MEMS pressure sensor
... The finite element simulations were performed as given by Gonzalez et al[13] to find the value of stress induced in the piezoresistors placed on the diaphragm of the pressure sensor. The Young’s modulus is assumed to be ...
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Inductively-Tuned K/Ka Band RF MEMS Capacitive Switches
... Inductively-tuned RF MEMS switches with DGS and air bridges are proposed, and DGS is covered with air ...The MEMS switches are designed, fabricated, measured, and ...the MEMS switch without ...
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