thin-film PECVD silicon nitride
Opto Structural Properties of Silicon Nitride Thin Films Deposited by ECR PECVD
10
Aspects of Silicon Solar Cells: Thin-Film Cells and LPCVD Silicon Nitride
24
Fabrication and characterization of silicon nitride thin film planar waveguides produced by RF magnetron sputtering technique
59
Liquid phase epitaxy of silicon for thin film silicon solar cells
124
Surface scattering mechanisms of tantalum nitride thin film resistor
5
Degradation processes of platinum thin films on a silicon nitride surface
44
Room Temperature and Reduced Pressure Chemical Vapor Deposition of Silicon Carbide on Various Materials Surface
8
Amorphous Nanocrystalline Transition in Silicon Thin Films Obtained by Argon Diluted Silane PECVD
5
Article Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge
8
Thin Film Silicon Photovoltaics: Characterization of Thin Film Deposition and Analysis of Enhanced Light Trapping from Scattering Nanoparticle Arrays
164
IR Spectroscopic Study of Silicon Nitride Films Grown at a Low Substrate Temperature Using Very High Frequency Plasma Enhanced Chemical Vapor Deposition
8
Electrical and Optical Properties of Ga-Doped Mg1-xZnxO System
203
Effects of annealing on the electro optical properties of a Si:H thin films deposited by D C and pulsed PECVD
6
A Theoretical Interpretation of NEXAFS of a Deuterated Hexagonal Boron Nitride Thin Film
6
Electron channelling contrast imaging for III-nitride thin film structures
7
Adaptive and Reconfigurable Architected Materials Driven by Electrochemistry
126
Non contact Thin Layer Conductivity Measurement Based on the Conjugate Magnetic Eddy Current Sensor
8
Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD
31
Process and Properties of Nitride-based Thin Film Heterostructures
13
Structural properties of hydrogenated amorphous silicon (A-SI:H) thin film grown via radio frequency plasma enhanced chemical vapor deposition (RF PECVD)
29