CHAPTER 7: AN INFRARED DETECTOR BASED ON THERMOMECHANICAL PLASMONIC
7.5. Contributions
In this project of plasmo-thermomechanical IR detector, I have explored the preliminary design of the IR absorption component by FDTD simulation. I have designed and built the high-vacuum measurement chamber, as well as some parts of the optical
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measurement system. I have performed the focused ion beam (FIB) milling to cut the membrane into nanobeams, and SEM characterization of the sample.
7.6.References
1. Bharadwaj, P., B. Deutsch, and L. Novotny, Optical Antennas. Advances in Optics and Photonics, 2009. 1(3): p. 438-483.
2. Novotny, L. and N. van Hulst, Antennas for light. Nature Photonics, 2011. 5(2): p. 83-90.
3. Tang, L., et al., Nanometre-scale germanium photodetector enhanced by a near- infrared dipole antenna. Nature Photonics, 2008. 2(4): p. 226-229.
4. Cubukcu, E., et al., Plasmonic Laser Antennas and Related Devices. Ieee Journal of Selected Topics in Quantum Electronics, 2008. 14(6): p. 1448-1461.
5. Cubukcu, E. and F. Capasso, Optical nanorod antennas as dispersive one- dimensional Fabry-Perot resonators for surface plasmons. Applied Physics Letters, 2009. 95(20).
6. Cao, L.Y., et al., Resonant Germanium Nanoantenna Photodetectors. Nano Letters, 2010. 10(4): p. 1229-1233.
7. Cubukcu, E., et al., Plasmonic laser antenna. Applied Physics Letters, 2006. 89(9). 8. Pillai, S., et al., Surface plasmon enhanced silicon solar cells. Journal of Applied
Physics, 2007. 101(9).
9. Anker, J.N., et al., Biosensing with plasmonic nanosensors. Nature Materials, 2008.
7(6): p. 442-453.
10. De Wilde, Y., et al., Thermal radiation scanning tunnelling microscopy. Nature, 2006. 444(7120): p. 740-743.
11. Schuller, J.A., T. Taubner, and M.L. Brongersma, Optical antenna thermal emitters. Nature Photonics, 2009. 3(11): p. 658-661.
12. Novotny, L. and S.J. Stranick, Near-field optical microscopy and spectroscopy with pointed probes. Annual Review of Physical Chemistry, 2006. 57: p. 303-331. 13. Govorov, A.O. and H.H. Richardson, Generating heat with metal nanoparticles.
Nano Today, 2007. 2(1): p. 30-38.
14. Richardson, H.H., et al., Thermooptical properties of gold nanoparticles embedded in ice: Characterization of heat generation and melting. Nano Letters, 2006. 6(4): p. 783-788.
142
15. Wang, J., et al., Photothermal reshaping of gold nanoparticles in a plasmonic absorber. Optics Express, 2011. 19(15): p. 14726-14734.
16. Baffou, G., R. Quidant, and C. Girard, Heat generation in plasmonic nanostructures: Influence of morphology. Applied Physics Letters, 2009. 94(15). 17. Baffou, G., R. Quidant, and F.J.G. de Abajo, Nanoscale Control of Optical Heating
in Complex Plasmonic Systems. Acs Nano, 2010. 4(2): p. 709-716.
18. Loo, C., et al., Nanoshell-enabled photonics-based imaging and therapy of cancer.
Technology in Cancer Research & Treatment, 2004. 3(1): p. 33-40.
19. Lal, S., S.E. Clare, and N.J. Halas, Nanoshell-Enabled Photothermal Cancer Therapy: Impending Clinical Impact. Accounts of Chemical Research, 2008.
41(12): p. 1842-1851.
20. O'Neal, D.P., et al., Photo-thermal tumor ablation in mice using near infrared- absorbing nanoparticles. Cancer Letters, 2004. 209(2): p. 171-176.
21. Han, S.E. and D.J. Norris, Beaming thermal emission from hot metallic bull's eyes.
Optics Express, 2010. 18(5): p. 4829-4837.
22. Wu, C.H., et al., Metamaterial-based integrated plasmonic absorber/emitter for solar thermo-photovoltaic systems. Journal of Optics, 2012. 14(2).
23. Sun, X.K., et al., Femtogram Doubly Clamped Nanomechanical Resonators Embedded in a High-Q Two-Dimensional Photonic Crystal Nanocavity. Nano Letters, 2012. 12(5): p. 2299-2305.
24. Naik, A.K., et al., Towards single-molecule nanomechanical mass spectrometry.
Nature Nanotechnology, 2009. 4(7): p. 445-450.
25. Yang, Y.T., et al., Zeptogram-scale nanomechanical mass sensing. Nano Letters, 2006. 6(4): p. 583-586.
26. Jensen, K., K. Kim, and A. Zettl, An atomic-resolution nanomechanical mass sensor. Nature Nanotechnology, 2008. 3(9): p. 533-537.
27. Teufel, J.D., et al., Nanomechanical motion measured with an imprecision below that at the standard quantum limit. Nature Nanotechnology, 2009. 4(12): p. 820- 823.
28. LaHaye, M.D., et al., Approaching the quantum limit of a nanomechanical resonator. Science, 2004. 304(5667): p. 74-77.
29. Knobel, R.G. and A.N. Cleland, Nanometre-scale displacement sensing using a single electron transistor. Nature, 2003. 424(6946): p. 291-293.
30. Kenny, T.W., et al., Novel Infrared Detector Based on a Tunneling Displacement Transducer. Applied Physics Letters, 1991. 59(15): p. 1820-1822.
31. Barnes, J.R., et al., Photothermal Spectroscopy with Femtojoule Sensitivity Using a Micromechanical Device. Nature, 1994. 372(6501): p. 79-81.
143
32. Barnes, J.R., et al., A Femtojoule Calorimeter Using Micromechanical Sensors.
Review of Scientific Instruments, 1994. 65(12): p. 3793-3798.
33. Lai, J., et al., Optimization and performance of high-resolution micro- optomechanical thermal sensors. Sensors and Actuators a-Physical, 1997. 58(2): p. 113-119.
34. Toda, M., et al., Evaluation of bimaterial cantilever beam for heat sensing at atmospheric pressure. Review of Scientific Instruments, 2010. 81(5).
35. Tao, H., et al., Microwave and Terahertz wave sensing with metamaterials. Optics Express, 2011. 19(22): p. 21620-21626.
36. Rasool, H.I., et al., A low noise all-fiber interferometer for high resolution frequency modulated atomic force microscopy imaging in liquids. Review of Scientific Instruments, 2010. 81(2).
37. Zhu, H., F. Yi, and E. Cubukcu, Nanoantenna Absorbers for Thermal Detectors.
Ieee Photonics Technology Letters, 2012. 24(14): p. 1194-1196.
38. Shchegolkov, D.Y., et al., Perfect subwavelength fishnetlike metamaterial-based film terahertz absorbers. Physical Review B, 2010. 82(20).
39. Wu, C.H., et al., Large-area wide-angle spectrally selective plasmonic absorber.
Physical Review B, 2011. 84(7).
40. Liu, X.L., et al., Infrared Spatial and Frequency Selective Metamaterial with Near- Unity Absorbance. Physical Review Letters, 2010. 104(20).
41. Bosman, H., Y.Y. Lau, and R.M. Gilgenbach, Microwave absorption on a thin film.
Applied Physics Letters, 2003. 82(9): p. 1353-1355.
42. Muhlschlegel, P., et al., Resonant optical antennas. Science, 2005. 308(5728): p. 1607-1609.
43. Ozisik, M.N., Heat conduction. 2nd ed. 1993, New York ; Toronto: J. Wiley. xvii, 692 p.
44. Bergman, T.L., et al., Fundamentals of heat and mass transfer. 2011: Wiley. 45. Bergman, T.L., et al., Fundamentals of heat and mass transfer. 7th ed. 2011,
Hoboken, NJ: Wiley. xxiii, 1048 p.
46. Roark, R.J. and W.C. Young, Formulas for stress and strain. 5th ed. 1975, New York: McGraw-Hill. xvi, 624 p.
47. Kruse, P.W., Uncooled thermal imaging : arrays, systems, and applications. Tutorial texts in optical engineering. 2001, Bellingham, Wash., USA: SPIE Press. xviii, 89 p.
48. Gabrielson, T.B., Mechanical-Thermal Noise in Micromachined Acoustic and Vibration Sensors. Ieee Transactions on Electron Devices, 1993. 40(5): p. 903-909.
144
49. Majorana, E. and Y. Ogawa, Mechanical thermal noise in coupled oscillators.
Physics Letters A, 1997. 233(3): p. 162-168.
50. Kwon, H., et al., Micro-optical fiber coupler on silicon bench based on microelectromechanical systems technology. Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers, 2007. 46(8B): p. 5473-5477.
51. Tao, H., et al., A metamaterial absorber for the terahertz regime: Design, fabrication and characterization. Optics Express, 2008. 16(10): p. 7181-7188.
145