Chapter 3. Distributed Multi-finger MOSFET ESD Models
3.4 Model Verification
In this section, it will be demonstrated that the proposed compact model well represents:
1) Vt1(VGS)
2) Vt1(Nf, wf)
3) Non-uniform turn-on of the MOSFET fingers
3.4.1 Gate Bias Effect
Figure 3.8(a) shows the measured and simulated TLP I-V curves measured at different values of VGS. Figure 3.8(b) shows the extracted Vt1 as a function of VGS. Simulation accurately represents the I-V curves and Vt1 as functions of gate bias, except in the case that only one finger of the device is triggered on, which is elaborated on in the following sections. VGS modulates the impact ionization generated body current which, in turn, provides the base current for the parasitic LNPN [13],[57]; snapback occurs when the LNPN turns on. Accurate modeling of VGS(Vt1) is critical for designing gate-coupled MOSFET protection circuits and active rail clamp protection circuits [63].
3.4.2 Trigger Voltage Vt1
The trigger voltage, Vt1, depends on the body resistance seen by the finger that first turns on. This first finger is most likely to reside at the center of the multi-finger structure because it is farthest away from the body pick-up ring at the periphery. Figure 3.9 shows the Vt1 values extracted from both measurement and simulation for GGNMOS with a varying numbers of fingers (Nf) and finger width (wf). Although the measured Vt1 varies by about 0.1V from pulse to pulse or sample to sample, the simulated Vt1 values match the measurement results reasonably well, indicating that the distributed MOSFET model captures the dependency of Vt1 on layout parameters.
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3.4.3 Non-uniform Turn-on of Fingers
Figure 3.10 compares the measured IDUT-VDUT curve of Figure 3.6 with that from simulation. Simulation correctly predicts non-uniform triggering of the gate fingers and confirms that it is the central two fingers which turn on at the lowest current, because the central fingers see a larger effective body resistance. The on-state resistance (RON) of each branch of the IDUT-VDUT curve is accurately represented in simulation.
Because the distributed model in Figure 3.2 is constructed based on the symmetric layout in Figure 3.1, the model is also symmetric and thus cannot represent conduction by an odd number of fingers. Therefore, it will not reproduce the IDUT-VDUT branch labeled as β1-fingerβ in Figure 3.6. However, this branch can be forced to appear in simulation by disabling all fingers except a central one or by introducing a small asymmetry into the model. The dashed line in Figure 3.10 shows the 1-finger simulation result; it matches up well against the measurement data, confirming that this branch of the curve is indeed due to conduction by just 1 finger.
Figure 3.11 shows the simulated IB-IDUT curve. The discontinuities and the slope changes evident in the measurement data are replicated in the simulation; these occur each time a new finger or pair of fingers is triggered on, as will be demonstrated next. At any given point on the curve, the total body current IB is the sum of the individual fingersβ body currents as indicated in (3.7).
πΌπ΅= β πΌπ΅[π] ππ
, π β [1, π] (3.7)
where IB[i] is the body current contributed by the ith finger of a N-finger device; note that the sum in (3.7) is taken over only the fingers that are triggered on. IB jumps, i.e. IB(IDUT) is discontinuous, whenever a new finger is triggered on and the number of current sources in the sum changes. This will be illustrated for the specific case of the 6-finger GGNMOS shown in Figure 3.2. Define πΌΜπ·ππ as the minimum current for which 4 fingers are triggered on; for πΌπ·ππ< πΌΜπ·ππ, only the center 2 fingers will be on. The body potential for each of the triggered on fingers is expressed in (3.8).
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ππ΅[π] = ππ΅πΈ,ππ+ πΌπ[π] β π π (3.8)
where IS[i] is the current flowing in the source of the ith finger and RS is its source-side series resistance; RS is the same for each finger. Once a finger is triggered, the potential drop across its LNPNβs base- emitter junction is roughly pinned at VBE,on. In the case that πΌπ·ππ< πΌΜπ·ππ (βcase (a)β), the current divides equally between the center two fingers, i.e., πΌπ[1] = πΌπ[2] =
1
2(πΌπ·ππβ πΌπ΅). It follows that πΌπ΅[1] = πΌπ΅[2] = 1 2πΌπ΅. The total body current for this case, πΌπ΅(π), is thus given by Eq. (3.9).
πΌπ΅(π)= 2ππ΅πΈ,ππ π π΅(π)+ π π + π π π π΅(π)+ π π πΌπ·ππ (3.9) where π π΅(π)= (π ππππππ 2 )β {π πππ π,π·+ ( π ππππππ 2 )β (π πππ π,π+ π π πππ)} (3.10)
Next consider the case that πΌπ·ππβ₯ πΌΜπ·ππ (βcase (b)β). Due to the layout symmetry, πΌπ[1] = πΌπ[2] and
πΌπ[3] = πΌπ[4]; also, πΌπ΅[1] = πΌπ΅[2] and πΌπ΅[3] = πΌπ΅[4]. It also follows that πΌπ[1] + πΌπ[3] = 1
2(πΌπ·ππβ πΌπ΅).
The total body current, πΌπ΅(π), in this case is given by (3.11).
πΌπ΅(π)= 4ππ΅πΈ,ππ 2π π΅(π)+ π π + π π (2π π΅(π)+ π π) πΌπ·ππβ (π πβ2π π΅ (π) ) π πππ π,π+ π π πππ (πΌπ[1] β πΌπ[3]) (3.11) where π π΅(π)= (π ππππππ 2 )β ( π ππππππ 2 )β (π πππ π,π+ π π πππ) (3.12)
At the current level πΌπ·ππ= πΌΜπ·ππ, (3.9) and (3.11) yield different values of IB, indicating that the function is discontinuous. This becomes especially evident if one neglects the right-most term in (3.11), which is smaller than the others. This results in a linear relation between IB and IDUT, with the slope and y- intercept being different for cases (a) and (b). Eq. (3.8) also explains why in Figure 3.11 IB is observed to
39 be an increasing function of IDUT, even after all the fingers are operating in snapback; the increasing voltage drop across the source resistor RS causes VB[i] to rise.
The lowest current branch in Figure 3.11 is the result of conduction in just a single finger and will not appear in the simulation results unless it is forced to do so. The simulation results predict that the GGNMOS will have negligibly small IDUT until IB is large enough to turn on the first finger, but in measurement IDUT appears at lower IB levels than predicted. This discrepancy is attributed to non-uniform conduction across the finger width, which occurs at very low current levels [69],[70],[71].