Chapter 5 Conclusions and Future Work
5.3 Ph.D Research Output
5.3.1 Poster Presentations
• Optimization of IrO2 Deposition on TiO2
2015 U.S. Army Research Laboratory, Adelphi, MD
• Comparison of PbZrxTi1-xO3 Devices with Either IrO2 or Pt Top Electrodes 2016 U.S. Army Research Laboratory, Adelphi, MD
• Ferroelectric Behavior Comparison of Gamma Irradiated PbZrxTi1-xO3 Devices with
Either IrO2 or Pt Top Electrodes
2016 Defense Threat Reduction Agency Review, Fort Belvoir, VA
• Evaluating PZT Thin Films Exposed to both Ionizing and Displacement Radiation 2017 U.S. Army Research Laboratory, Adelphi, MD
• Growth Behavior for Sputtered IrO2 Thin Film Plate-like Structures
2017 U.S. – Japan Seminar on Dielectric and Piezoelectric Ceramics, Santa Fe, NM • Effects on Ferroelectric Thin-Film Stacks and Devices for piezoelectric MEMS
Applications at Varied Total Ionizing Dose (TID)
2017 Government Microcircuit Applications & Critical Technology Conference, Reno,
NV
• Determination of Elastic Modulus of IrO2 Thin Films for PiezoMEMS Applications
2017 International Symposium of Applied Ferroelectrics, Atlanta, GA
• Varied Total Ionization Dose (TID) study on PZT based Thin-Film Stacks and Actuator
Devices for Piezoelectric MEMS applications
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5.3.2 Oral Presentations
• Optimization of IrO2 as a Top Electrode for PZT Thin Film Devices
2016 Electronics and Materials Applications, Orlando, FL
• Comparison of PbZrxTi1-xO3 Devices with Either IrO2 or Pt Top Electrodes
2016 International Workshop on Acoustic Transduction Materials and Devices,
Penn St. University, State College, PA
• Evaluation of Fabrication Induced Damage on the Ferroelectric & Piezoelectric PZT Thin
Films for Clamped and Unclamped Final Devices
2017 Electronics and Materials Applications, Orlando, FL • Fabrication-Induced Defects in PZT-based devices
113
5.3.3 Publications
• M. Rivas, B. Sanchez, M.B. Graziano, R.Q. Rudy, E.J. Sandoz-Rosado, G.R. Fox, P. Sunal, L. Nataraj, B.D. Huey, R.G. Polcawich, and B. Hanrahan “IrOx Top Electrodes for Piezo- and Pyroelectric Performance Enhancements on Lead Zirconate Titanate Thin Film Devices” Smart Materials and Structures, Submitted 2018
• M. Rivas, S.J. Brewer, C. Callaway, H. Zhou, R.Q. Rudy, E.R. Glaser, C.D. Cress, J.E. Guerrier, J.L. Jones, N. Bassiri-Gharb, and R.G. Polcawich. “Effects on Ferroelectric Thin- Film Stacks and Devices for Piezoelectric MEMS Applications at Varied Total Ionizing Dose (TID)” GOMACTech proceedings (2017)
• M. Rivas, R.Q. Rudy, B. Hanrahan, B.D. Huey, R.G. Polcawich, “Fabrication Induced Damage on PZT-based Devices” U.S. Army Research Lab, Technical Report, Submitted 2018
• M. Rivas, B. Sanchez, R.Q. Rudy, B. Hanrahan, G.R. Fox, P. Sunal, L. Nataraj, B.D. Huey, and R.G. Polcawich “Growth Behavior for Sputtered IrO2 Thin Film Plate-like Structures”
U.S. – Japan Proceedings (2017)
• S.J. Brewer, C.D. Cress, S.C. Williams, H. Zhou, M. Rivas, R.Q. Rudy, R.G. Polcawich, E.R. Glaser, J.L. Jones, and N. Bassiri-Gharb “Phenomenological Model for Radiation- Induced Defect Interactions in Functional Materials” Scientific Reports, 7.1, 5308 (2017)
• S.J. Brewer, S.C. Williams, L.A. Griffin, C.D. Cress, M. Rivas, R.Q. Rudy, R.G.
Polcawich, E.R. Glaser, and N. Bassiri-Gharb "Enhanced radiation tolerance in Mn-doped ferroelectric thin films." Applied Physics Letters 111.2 (2017): 022906.
• R.Q. Rudy, K. Grove, M. Rivas, J.E. Guerrier, C.D. Cress, R.R. Benoit, J.L. Jones, E.R. Glaser, S.J. Brewer, N. Bassiri-Gharb, and R.G. Polcawich “Total Ionizing Dose Effects on Piezoelectric Thin-Film Cantilevers with Oxide Electrodes” IEEE T-UFFC, 64, 7, 1135-1143 (2017)
• S.J. Brewer, C.D. Cress, S.C. Williams, H. Zhou, M. Rivas, R.Q. Rudy, R.G. Polcawich, E.R. Glaser, J.L. Jones, and N. Bassiri-Gharb "Effect of microstructure on irradiated ferroelectric thin films." Journal of Applied Physics 121.24 (2017): 244102.
• D.M. Potrepka, M. Rivas, H. Yu, R.G. Polcawich, M. Aindow, and G.R. Fox “Characterization of IrOx Sputtering for IrO2 and IrO2/Pt Bottom-Electrode Piezoelectric Micro-Electro-Mechanical Systems Applications” Thin Solid Films 638, 127-137 (2017)
114
• B. Hanrahan, Y. Espinal, C. Neville, R. Rudy, M. Rivas, A. Smith, M.T. Kesim, and S. P. Alpay “Accounting for the various contributions to pyroelectricity in lead zirconate titanate thin films," Journal of Applied Physics, Vol.123, Issue 12, (2018)
• D.M. Potrepka, M. Rivas, H. Yu, R.G. Polcawich, M. Aindow, and G.R. Fox “Effect of IrO2/Pt bottom electrodes on the structure and electrical properties of PZT PiezoMEMS devices” Submitted 2017
• H. Zhou, M. Liu, S.C. Williams, L.A. Griffin, C.D. Cress, M. Rivas, R.Q. Rudy, R.G. Polcawich, E.R. Glaser, N. Bassiri-Gharb, A.I. Hawari, and J.L. Jones “Radiation-induced changes of point defects in ferroelectric capacitors as revealed by Doppler Broadening Positron Annihilation SPectroscopy” Applied Physics Letters Submitted 2018
• M. Rivas, C.D. Cress, H. Zhou, J.L. Jones, N. Bassiri-Gharb, R.G. Polcawich, and R.Q. Rudy “In-situ characterization of ferroelectric and piezoelectric PZT devices during gamma ray irradiation” (in progress)
115
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