Peak Sensor Systems
e-Diagnostics Initiative
Adding e-Diagnostic
Capability to ProPak Technology
Pam Ward / Peak Sensor Systems
[email protected], 505.342.1170, 106
ProPak Plasma Monitoring System
•
Current Features
:– Fault library of known faults – Internal e-mail and pager
notification on Fault
– Historical data collection – Broadband OES technology
– Remote access via desktop tools – Dual methods for endpoint
– Playback tools for analysis
•
Pending Release: PlasmaTrax
– State of Health Data Base – Statistical analysis (PCA) – Return from clean
• Features Under Development
– e-Diagnostics
– Notification internally and to OES vendor and OEM provider
– Integration of Tool State on Board Sensors
– Data reduction technology – Fingerprinting
– Automatic algorithm development
Building Value
Endpoint Fault Detection State of Health
OEM Tool Parameter Archival
Fault Detection and State of Health Analysis OES in conjunction with Tool State Data
e-Diagnostic Communication of Tool Fault, Process Fault and Sensor fault to Quality Partners
Peak is building value by building on past successes. Adding nested layers of capability allows Peak to provide customized plasma monitoring solutions
Peak’s Historic Connectivity
Equipment Interface Engineer Desktop Engineer Desktop Engineer Desktop FAB Network Advanced Communications (Ethernet TCP/IP) DATA (SECS/GEM) Etch Cluster ToolPr o Pak OES (Fiber-Optics) e-mail / paging Comm SW SECS
Peak’s Vision of e-Diagnostics
ProPak monitors plasma process:
• All desired recipes and steps for endpoint
• Known fault conditions as they exist in a fault library
• Unknown fault conditions based on process trend excursion detection
ProPak monitors sensor condition
• Fiber condition, alignment • Tape backup status
• Spectrometer status • Communication status
ProPak monitors tool condition
• Critical tool parameters collected, archived, evaluated as part of process monitoring
• Validates tool parameters with OES data for more detailed fault analysis and diagnosis
• ProPak provides critical information regarding tool health using degradation analysis based on trend analysis
ProPak communicates between Quality Assurance Partners
e-Diagnostics Process Flow
OES Plasma Process Monitoring and Tool State Data Collection Process On? Plasma Monitoring Enabled? Yes No EP Detected? EP Normal? No Yes Process Completed Without Faults? No Yes Log Data Is it a New Day? No Send Heartbeat Message to Vender, OES Partner, Etc. Yes Process Fault Tool Fault Sensor Fault Log Data Notify: APC System, Tool Controller, Appropriate Contacts Internal Network Notification
of Engineer or Maintenance Personnel via Internal
Network
Internet Notification of External Vendors, OEM, Other Authorized Users
Peak’s e-Diagnostics Connectivity Plan,
No Additional Network
AEC/APC control system such as Fabworks,
Brookside,etc. (May not be available)
Engineer Desktop Engineer Desktop Engineer Desktop FAB Network DATA (SECS/GEM) OES (Fiber-Optics) Peak Sensor Systems
LAM ProPak IPC Fire Wall Process Fault Fault Mediation (Ethernet TCP/IP)
Etch Cluster Tool
Tool Status Tool Faults Fault Mediation Tool Diagnostics Sensor Status Sensor Faults Fault Mediation Sensor Diagnostics
Lot, Slot, Recipe, Step Start, Step Stop, On Board Sensor Data
Fire Wall Fire Wall Internet 2-way VPN Communication 2-way VPN Communication
Peak’s e-Diagnostics Connectivity Plan,
Additional Network
The User’s View
User receive heartbeat message from ProPak? Yes No Quality Partners are alerted to heartbeat message failure User loads production into etch chamber Plasma processing begins ProPak determines if plasma monitoring enabled Yes No ProPak remains idleHas process fault occurred?
Has process tool
fault occurred? Has sensor fault occurred? ProPak monitors for
endpoint and fault conditions
OES & Tool state data collected Yes No No Yes Yes No Was endpoint successfully detected? Yes Data and process
results logged Quality Partners notified, fault information logged with data No Quality Partners are notified of endpoint failure, data logged with failure details
Service Call initiated by OEM
or Sensor Vendor. Service Call Notice goes
to User
Is fault tool or sensor related?
Yes Process Fault Notice is
sent to User
No Plasma process halted, damage
Technical Demonstration
•
Detection of known fault conditions based upon OES
data merged with tool state data.
•
Communicate the occurrence of fault
– Process fault: Facility Engineer (SEMATECH, Austin) – Sensor fault: Sensor Vendor (Peak Sensor Systems,
Albuquerque)
– Tool fault: OEM Provider (LAM Research, Fremont)
•
Test Details
– 100% Silicon represented “normal” product
– 100% Photoresist represented a “no mask” process fault
– A detached and blocked fiber represented “Broken Fiber” sensor fault
Fault Details
Ratio (722-730) to (652-662) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 5 10 15 20 25 30 35 40 Time (sec.)Normal Wafer (No PR) 100% PR
Broken Fiber +25% Cl -25% Cl
652,662,722,730,1.33 -- 2st Test for Broken Fiber
722,730,652,662,0.33 -- 5th Test for Low Cl2 Flow 652,662,722,730,2.17 -- 4th Test for High Cl2 Flow
Note: these tests may catch other unpredicted problems since these bandpasses are sensitive to other parameters of a well behaved process. Light Leak
Fault Details
Ratio (360-415) / (505-525) 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 0 5 10 15 20 25 30 35 40 Time (sec.)Normal Wafer (No PR) 100% PR
Broken Fiber +25% Cl -25% Cl
360,415,505,525,0.75 -- 1st Test for 100% PR
Understanding Plasma Parameter Space
• Plasmas reside inside of an operational space.
• Plasmas are dynamic systems that strive to maintain a balance by compensating for slight drifts in gas flow, pressure, power and temperature.
• Ideally, plasma parameters are
picked so that the plasma resides in the center of the parameter space, resulting in robust plasma systems tolerant to larger parameter shifts.
• OES is not a quantitative tool, but rather qualitative. It can only
respond when parameters have shifted the plasma out of the space.
Peak’s Goals for e-Diagnostics
Unprecedented Customer Support
•
e-Diagnostic capability allows Peak Sensor Systems to
provide an unprecedented level of customer support
– OEM/Vendor partnerships build on e-Diagnostic capabilities allcollaborative trouble shooting via remote connectivity
• 24 Hour process surveillance
• Immediate response to trouble calls
– Remote connectivity allow OEM/Vendor partners to provide JIT service and response
• Predictive tool and sensor maintenance
• Instantaneous installation of software upgrades • Instantaneous service contract support
– With remote access to the tool sets in the field, OEM/Vendor partners can provide remote performance monitoring and tool operation
• Engineering support to develop fault detection methods, endpoint algorithms, etc.
What Went Wrong
Lessons Learned
•
Peak Sensor Systems became involved in the e-Diagnostic
program relatively late in the year (October, 2002)
•
The short time to develop and test was negatively impacted
by the holiday seasons, making it difficult to run repetitive
tests
•
The original tool demonstration was performed the week
before Christmas, impacting the number of attendees to
the demonstration
•
Demonstrations were run with PR blanks and Si blanks,
therefore the tests had no real-world applicability
•
Simulation of tool fault type was not as sensitive as we
What Went Right?
•
Peak and Lam received excellent support and active
collaboration from ISMT without which these successes
would have not been possible:
– Communications between the Sensor and Quality Partners, Peak, Lam and ISMT were quickly established.
– VPN access to the in Fab OmniPak system was simple and elegant once established.
– Remote access allowed Peak engineers to perform much of the required development on the Austin system from Peak’s Albuquerque office-Saving $$$ and Time while offering a higher level of customer support. – System configuration, data retrieval, and sensor software upgrades were
performed remotely without any issues.
– Tool parameter gathering and archival was successful.
– Communication of tool status (heartbeat messages, fault conditions) was delivered to all quality partners immediately upon occurrence.
The Future of e-Diagnostics at Peak
•
Where Peak wants to go from here:
– Diagnostics based on tool parameter deviations – Linking the Fabs via ProPak
– More detailed fault information – Incorporation of additional sensors
– Addition of predictive maintenance capability to ProPak
• Predictive cleans
• Impending tool failure
• Detailed diagnostics with “Just in Time” replacement part acquisition to maintain tool and sensor performance.
– Establish 24 hour Customer support centers to provide in fab support via electronic monitoring.
• EP development
• Fault algorithm development • Etc.
– Enhanced Security
• User identity and activity logs • Security keyed information
