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extreme ultraviolet (EUV)

Optimization of Extreme Ultraviolet Emission from Laser-Produced Tin Plasmas Based on Radiation Hydrodynamics Simulations

Optimization of Extreme Ultraviolet Emission from Laser-Produced Tin Plasmas Based on Radiation Hydrodynamics Simulations

... Extreme ultraviolet (EUV) emission from laser- produced plasmas can be used as the light source used in lithography of next generation semiconductors ...

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Extreme ultraviolet (EUV) solar spectral irradiance (SSI) for ionospheric application – history and contemporary state-of-art

Extreme ultraviolet (EUV) solar spectral irradiance (SSI) for ionospheric application – history and contemporary state-of-art

... During his activities in the Ionosphären-Institut Breisach, in 1957 Karl Rawer decided to start research in the field of so- lar radiation that is most strongly controlling the ionosphere flowed by the interaction with ...

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Experiments and Simulations of short-pulse laser-pumped extreme ultraviolet lasers

Experiments and Simulations of short-pulse laser-pumped extreme ultraviolet lasers

... LASMA-BASED extreme ultraviolet (EUV) lasers (often referred to as X-ray lasers) have been investigated almost from the time of the invention of the ...

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Ablation and transmission of thin solid targets irradiated by intense extreme ultraviolet laser radiation

Ablation and transmission of thin solid targets irradiated by intense extreme ultraviolet laser radiation

... The interaction of an extreme ultraviolet (EUV) laser beam with a parylene foil was studied by experiments and simulation. A single EUV laser pulse of nanosecond duration focused to an intensity of 3 × 10 ...

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Laser triggered Z pinch broadband extreme ultraviolet source for metrology

Laser triggered Z pinch broadband extreme ultraviolet source for metrology

... Laser produced plasmas (LPPs) and discharge produced plasmas (DPPs) have been extensively studied as radiation sources for extreme ultraviolet (EUV) lithography at 13.5 nm. 1 Current state-of-the-art ...

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Laser Production of Extreme Ultraviolet Light Source for the Next Generation Lithography Application

Laser Production of Extreme Ultraviolet Light Source for the Next Generation Lithography Application

... Extreme ultraviolet lithography (EUVL) is a technology to be used in mass production of the next-generation semiconductor devices. Critical issues in the development of a Sn-based EUV source are in ...

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Power scaling of an extreme ultraviolet light source for future lithography

Power scaling of an extreme ultraviolet light source for future lithography

... For future lithography applications, high-power extreme ultraviolet (EUV) light sources are needed at a central wavelength of 13.5 nm within 2% bandwidth. We have demonstrated that from a physics point of ...

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The key role of very-low-energy-electrons in tin-based molecular resists for extreme ultraviolet nanolithography

The key role of very-low-energy-electrons in tin-based molecular resists for extreme ultraviolet nanolithography

... approaches, extreme ultraviolet lithography (EUVL) is the most promising candidate to reach the targeted sub-20 nm resolution by employing a much shorter wavelength ...

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Observation of a quasiperiodic pulsation in hard X ray, radio and extreme ultraviolet wavelengths

Observation of a quasiperiodic pulsation in hard X ray, radio and extreme ultraviolet wavelengths

... We present multi-wavelength analysis of a quasi-periodic pulsation (QPP) observed in the hard X- ray, radio, and extreme-ultraviolet (EUV) channels during an M1.9 flare occurred on 23–24 September 2011. The ...

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Photoionized plasmas induced in molecular gases by extreme ultraviolet and X-ray pulses

Photoionized plasmas induced in molecular gases by extreme ultraviolet and X-ray pulses

... An extreme ultraviolet and soft X-ray (EUV/SXR) radiation pulse was used for ionization of molecular gases, injected into a vacuum chamber synchronously with the EUV/SXR ...

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Extreme ultraviolet spectral irradiance measurements since 1946

Extreme ultraviolet spectral irradiance measurements since 1946

... solar extreme ultraviolet (EUV) radiation plays a domi- nant role controlling most of the thermospheric/ionospheric (T/I) ...the extreme ultraviolet spectral region on our upper atmosphere in ...

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Combined Focusing and Flat Field Spectrometer System for Extreme  Ultraviolet Pulse

Combined Focusing and Flat Field Spectrometer System for Extreme Ultraviolet Pulse

... to extreme (or nonperturbative) nonlinear optical mechanism, of which one of the most exciting achievements is the establishment of new light source—single iso- lated attosecond laser pulse in extreme ...

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The X ray and extreme ultraviolet flux evolution of SS Cygni throughout outburst

The X ray and extreme ultraviolet flux evolution of SS Cygni throughout outburst

... the extreme- ultraviolet waveband, but more recently the Extreme Ultraviolet Explorer (EUVE) has provided the first detailed view of dwarf nova outbursts in the extreme ...the ...

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Extreme ultraviolet emission from dense plasmas generated with sub-10-fs laser pulses

Extreme ultraviolet emission from dense plasmas generated with sub-10-fs laser pulses

... The extreme ultraviolet 共XUV兲 emission from dense plasmas generated with sub-10-fs laser pulses with varying peak intensities up to 3 ⫻ 10 16 W / cm 2 is investigated for different target ...

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Real-time observation of water radiolysis and hydrated electron formation induced by extreme-ultraviolet pulses

Real-time observation of water radiolysis and hydrated electron formation induced by extreme-ultraviolet pulses

... Understanding of the primary steps of water photolysis and radiolysis remains unexpectedly humble despite the paramount importance of these processes in chemistry, biophysics, atmospheric sciences, and technology (1–3). ...

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The MUSCLES Treasury Survey  II  Intrinsic Lyα and extreme ultraviolet spectra of K and M dwarfs with exoplanets

The MUSCLES Treasury Survey II Intrinsic Lyα and extreme ultraviolet spectra of K and M dwarfs with exoplanets

... the extreme-UV spectrum for each target in nine (∼ 100 Å) bandpasses in the interval 100 – 1170 Å using empirically derived relations between total Ly α fl ux and extreme-UV fl ux presented by Linsky et ...of ...

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Telescope of extreme ultraviolet (TEX) onboard SELENE: science from the Moon

Telescope of extreme ultraviolet (TEX) onboard SELENE: science from the Moon

... and extreme ultraviolet images of atomic and plasma distribution in the upper atmosphere and iono- sphere and around the ...for EXtreme ultraviolet light (UPI- ...

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Streaked extreme ultraviolet imaging of the motion of low-Z foam buffered indirectly driven intermediate and high-Z payloads

Streaked extreme ultraviolet imaging of the motion of low-Z foam buffered indirectly driven intermediate and high-Z payloads

... reported. Extreme ultraviolet imaging has been utilized to map the trajectory of the rear surface of an accelerating payload driven by a hohlraum with a peak energy-density-equivalent radiation temperature ...

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Extreme ultraviolet imaging of three dimensional magnetic reconnection in a solar eruption

Extreme ultraviolet imaging of three dimensional magnetic reconnection in a solar eruption

... of extreme ultraviolet images clearly shows that two groups of oppositely directed and non-coplanar magnetic loops gradually approach each other, forming a separator or quasi-separator and then ...

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Modelling extreme ultraviolet ablation interactions

Modelling extreme ultraviolet ablation interactions

... The simple models detailed above are limited as they ignore the absorption of the EUV laser light once a plasma forms. Here we describe a model that includes this absorption, named euved (Extreme Ultra-Violet ...

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