Do Minh Nghiep
Do Minh Nghiep
Materials Science Center
Materials Science Center
Electron Microscopy
Electron Microscopy
Electron Microscopy
Electron Microscopy
and Diffraction
and Diffraction
and Diffraction
and Diffraction
1. Introduction
1. Introduction
1. Introduction
1. Introduction
Contact
Contact
Contact
Contact
Lecturer:
Lecturer:
Đỗ
Đỗ
Minh Nghi
Minh Nghi
ệ
ệ
p
p
-Tel. 38691332
Tel. 38691332
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Class time: Mon 14:50-17:20
Class time: Mon 14:50-17:20
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sample preparation
sample preparation
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for
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elemental
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Lab works
Lab works
Lab works
Lab works
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Textbook:
Textbook:
Handouts
Handouts
References:
References:
1
1
.
.
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D
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B
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,
,
Transmission electron microscopy
Transmission electron microscopy
,
,
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B
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.
.
;
;
Elect
Elect
ron
ron
micro
micro
scopy of
scopy of
thin crystals
thin crystals
;
;
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H
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3
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Lig
Lig
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and
and
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ele
ctro
ctro
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mic
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rosc
rosc
opy
opy
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;
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Ca
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br
br
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id
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(E
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or
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Un
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Pr
Pr
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fo
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r
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The weighting factors used to determine
The weighting factors used to determine
t
t
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g
r
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a
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:
:
Lab
Lab
work
work
and
and
reports:
reports:
20
20
%
%
Week
Week
1
1
Why
Why
elect
elect
ron
ron
micros
micros
cope
cope
-
-
a
a
brief
brief
histo
histo
ry
ry
Week
Week
2
2
Electron
Electron
sources,
sources,
Vacuum
Vacuum
Week
Week
3
3
Electron
Electron
optics,
optics,
Electromagnetic
Electromagnetic
lenses,
lenses,
Resolution
Resolution
limits
limits
Week
Week
4
4
Electron
Electron
beam
beam
-specimen
-specimen
interactions
interactions
Week Week 5 5 Mid-term Mid-term test test
Week
Week
6
6
SEM:
SEM:
Scanning
Scanning
system,
system,
Detectors,
Detectors,
SE
SE
image,
image,
Backscattered image, Resolution
Backscattered image, Resolution
,
,
-
-
,
,
Diffraction, Phase)
Diffraction, Phase)
Week
Week
8
8
Microprobe
Microprobe
analysis:
analysis:
Detection
Detection
systems
systems
(EDS,
(EDS,
WDS),
WDS),
Qualitative
Qualitative
and quantitative analysis
and quantitative analysis
Week Week 9 9 Practical Practical lab lab for for SEM, SEM, EDS EDS
Week
Introduction
Introduction
Introduction
Introduction
•
•
•
•
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•
•
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H
Hi
History
History
is
st
to
or
ry
y
•
•
•
•
W
Wh
Why EM ?
Why EM ?
hy
y
E
EM
M
?
?
•
•
•
•
•
•
•
characterization
characterization
characterization
characterization
mean?
mean?
mean?
mean?
Character:
Character:
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others
Characterize:
Characterize:
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rac
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n:
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inter
inter
nal
nal
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micr
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ostru
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cture
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including
including
the chemistry, the crystallography, the structural morphology
the chemistry, the crystallography, the structural morphology
characterization is important?
characterization is important?
characterization is important?
characterization is important?
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.
structure and properties
structure and properties
structure and properties
structure and properties
•
•
-
-•
•
At
At
om
om
ic
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ve
ve
l:
l:
Ph
Ph
ys
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s a
nd C
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he
he
mi
mi
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ry
ry
•
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cr
cr
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co
pi
pi
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c le
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ca
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d Ma
d Ma
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s En
s En
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of materials
of materials
of materials
of materials
Mechanical properties
Mechanical properties
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m
c
c
a
a
p
p
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p
p
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Physical properties
Physical properties
--
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Th
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ma
ma
l pr
l pr
op
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ty
ty
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Op
ti
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ca
ca
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El
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pr
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ty
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Ma
Ma
gn
gn
et
et
ic
ic
pr
pr
op
op
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ty
ty
Equipments
Equipments
Equipments
Equipments
analysis
analysis
analysis
analysis
molecular levels)
molecular levels)
molecular levels)
molecular levels)
Equipments
Equipments
Equipments
Equipments
analysis
analysis
analysis
analysis
levels)
levels)
levels)
levels)
Histor
Histor
Histor
Op
Op
ti
ti
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ca
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l
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gh
t
t
m
m
i
i
cr
cr
os
os
co
co
pe
pe
(
(
O
O
M)
M)
:
:
v
v
i
i
s
s
i
i
b
b
l
l
e
e
l
l
i
i
g
g
h
h
t
t
l
l
i
i
m
m
i
i
t
t
s
s
m
m
a
a
g
g
n
n
i
i
f
f
i
i
c
c
a
a
t
t
i
i
o
o
n
n
o
o
f
f
m
m
a
a
x
x
1
1
0
0
0
0
0
0
-
-
2
2
0
0
0
0
0
0
X
X
a
a
n
n
d
d
r
r
e
e
s
s
o
o
l
l
u
u
t
t
i
i
o
o
n
n
o
o
f
f
0
0
,
,
2
2
m
m
m
m
.
.
E
E
l
l
e
e
c
c
t
t
r
r
o
o
n
n
m
m
i
i
c
c
r
r
o
o
s
s
c
c
o
o
p
p
e
e
(
(
E
E
M
M
)
)
is
is
de
de
ve
ve
lo
lo
pe
pe
d
d
fo
fo
r
r
ov
ov
er
er
co
co
mi
mi
ng
ng
th
th
es
es
e
e
li
li
mi
mi
ta
ta
ti
ti
on
on
s.
s.
1
1
9
9
3
3
2
2
-
-
1
1
9
9
3
3
8
8
:
:
--
T
T
h
h
e
e
f
f
i
i
r
r
s
s
t
t
T
T
E
E
M
M
(
(
1
1
9
9
3
3
2
2
,
,
i
i
d
d
e
e
a
a
o
o
f
f
E
E
M
M
,
,
M
M
a
a
x
x
K
K
n
n
o
o
l
l
l
l
a
a
n
n
d
d
E
E
r
r
n
n
s
s
t
t
R
R
u
u
s
s
k
k
a
a
,
,
Germany)
Germany)
--
T
T
h
h
e
e
f
f
i
i
r
r
s
s
t
t
S
S
E
E
M
M
(1
(1
93
93
8,
8,
la
la
te
te
r
r
STEM
STEM
-
-
T
T
E
E
M
M
w
w
i
i
t
t
h
h
s
s
c
c
a
a
n
n
n
n
i
i
n
n
g
g
c
c
o
o
i
i
l
l
,
,
K
K
n
n
o
o
l
l
l
l
a
a
n
n
d
d
,
,
19
19
40
40
-1
-1
95
95
2
2
:
:
--
T
T
h
h
e
e
f
f
i
i
r
r
s
s
t
t
S
S
E
E
M
M
f
f
o
o
r
r
t
t
h
h
i
i
c
c
k
k
s
s
a
a
m
m
p
p
l
l
e
e
(
(
1
1
9
9
4
4
2
2
,
,
Z
Z
w
w
o
o
r
r
y
y
k
k
i
i
n
n
e
e
t
t
a
a
l
l
.
.
,
,
R
R
C
C
A
A
a
a
o
o
r
r
a o
a o
r
r
e
e
s
s
.
.
.
.
, r
, r
e
e
s
s
o
o
u
u
o
o
n
n
m
m
m
m
.
.
--
T
T
h
h
e
e
f
f
i
i
r
r
s
s
t
t
F
F
ie
ie
l
l
d
d
Em
Em
i
i
ss
ss
io
io
n
n
el
el
ec
ec
tr
tr
on
on
so
so
ur
ur
ce
ce
(
(
1
1
9
9
4
4
2
2
,
,
F
F
E
E
G
G
u
u
n
n
)
)
--
The
The
S
S
E
E
M
M
w
w
i
i
t
t
h
h
r
r
e
e
s
s
o
o
l
l
u
u
t
t
i
i
o
o
n
n
o
o
f
f
5
5
0
0
n
n
m
m
(
(
1
1
9
9
5
5
2
2
,
,
O
O
a
a
t
t
l
l
e
e
y
y
a
a
n
n
d
d
M
M
c
c
M
M
u
u
l
l
l
l
a
a
n
n
,
,
n
n
g
g
a
a
n
n
1959-1967:
1959-1967:
--
S
S
E
E
M
M
w
w
i
i
t
t
h
h
stereoscan
stereoscan
(Wells)
(Wells)
--
P
P
e
e
r
r
f
f
o
o
r
r
m
m
a
a
n
n
c
c
e
e
o
o
f
f
S
S
E
E
d
d
e
e
t
t
e
e
c
c
t
t
o
o
r
r
(
(
1
1
9
9
6
6
0
0
,
,
E
E
v
v
e
e
r
r
h
h
a
a
r
r
t
t
a
a
n
n
d
d
Thornley)
Thornley)
--
T
T
h
h
e
e
f
f
i
i
r
r
s
s
t
t
co
co
mm
mm
er
er
ci
ci
al
al
EM
EM
(1965)
(1965)
--
E
E
l
l
e
e
c
c
t
t
r
r
o
o
n
n
-
-
c
c
h
h
a
a
n
n
n
n
e
e
l
l
i
i
n
n
g
g
c
c
o
o
n
n
t
t
r
r
a
a
s
s
t
t
f
f
o
o
r
r
c
c
r
r
y
y
s
s
t
t
a
a
l
l
o
o
r
r
i
i
e
e
n
n
t
t
a
a
ti
ti
o
o
n
n
s
s
(1967)
(1967)
[
[
O
O
a
a
t
t
l
l
e
e
y
y
(
(
1
1
9
9
8
8
2
2
)
)
,
,
J
J
.
.
A
A
p
p
p
p
l
l
.
.
P
P
h
h
y
y
s
s
.
.
5
5
3
3
,
,
R
R
1
1
]
]
1932 theory of EM
1932 theory of EM
ththAntonie van Leeuwenhoek,
Antonie van Leeuwenhoek,
1986 Nobel Prize winners
James Hillier
EM
EM
1940
1940
1938
The prototype of the
The prototype of the
first Stereoscan
first Stereoscan
supplied by the
supplied by the
Company to the
Company to the
duPo
duPo
nt
nt
Com
Com
pany
pany
,
,
U.S.A. (Stewart and
U.S.A. (Stewart and
McMullan’s original
W
W
h
h
E
E
M
M
?
?
W
e
e
n
n
o
o
n
n
e
e
n
n
o
o
n
n
Microscope
Microscope
-
-
A
A
device
device
w
w
i
i
t
t
h
h
a
a
l
l
e
e
n
n
s
s
o
o
r
r
s
s
e
e
r
r
i
i
e
e
s
s
o
o
f
f
l
l
e
e
n
n
s
s
e
e
s
s
t
t
h
h
a
a
t
t
e
e
n
n
l
l
a
a
r
r
g
g
e
e
(
(
m
m
a
a
g
g
n
n
i
i
f
f
y
y
)
)
t
t
h
h
e
e
a
a
p
p
p
p
e
e
a
a
r
r
a
a
n
n
c
c
e
e
o
o
f
f
a
a
n
n
o
o
b
b
j
j
e
e
c
c
t
t
.
.
Image
Image
-
-
P
P
e
e
r
r
c
c
e
e
p
p
t
t
i
i
o
o
n
n
o
o
f
f
a
a
n
n
o
o
b
b
j
j
e
e
c
c
t
t
u
u
s
s
i
i
n
n
g
g
y
y
o
o
u
u
r
r
e
e
y
y
e
e
s
s
(
(
vision
vision
).
).
O
O
n
n
e
e
c
c
a
a
n
n
s
s
e
e
n
n
s
s
e
e
a
a
n
n
o
o
b
b
j
j
e
e
c
c
t
t
w
w
i
i
t
t
h
h
o
o
u
u
t
t
v
v
i
i
s
s
i
i
o
o
n
n
(
(
t
t
o
o
u
u
c
c
h
h
,
,
e
e
t
t
c
c
.
.
.
.
)
)
.
.
Re
Re
qu
qu
ir
ir
es
es
vi
vi
si
si
bl
bl
e
e
li
li
gh
gh
t.
t.
Lens
Lens
-
-
A
A
l
l
e
e
n
n
s
s
i
i
s
s
a
a
n
n
optical component
optical component
w
w
h
h
i
i
c
c
h
h
i
i
s
s
u
u
s
s
e
e
d
d
t
t
o
o
.
.
m
M
M
a
a
n
n
i
i
f
f
i
i
c
c
a
a
t
t
i
i
o
o
n
n
-
-
T
T
h
h
e
e
ratio
ratio
between
between
ima e size
ima e size
t
t
o
o
t
t
h
h
e
e
ob
ob
je
je
ct
ct
si
si
ze
ze
.
.
C
C
a
a
n
n
b
b
e
e
v
v
a
a
r
r
i
i
e
e
d
d
b
b
y
y
c
c
h
h
a
a
n
n
g
g
i
i
n
n
g
g
t
t
h
h
e
e
d
d
i
i
s
s
t
t
a
a
n
n
c
c
e
e
b
b
e
e
t
t
w
w
e
e
e
e
n
n
t
t
h
h
e
e
o
o
b
b
j
j
e
e
c
c
t
t
a
a
n
n
d
d
t
t
h
h
e
e
f
f
i
i
n
n
a
a
l
l
l
l
e
e
n
n
s
s
(
(
o
o
f
f
t
t
h
h
e
e
e
e
y
y
e
e
)
)
o
o
r
r
b
b
y
y
.
.
Resolution
Resolution
--
RP
RP
is t
is t
he
he
sma
sma
lle
lle
st
st
points at which two or more
points at which two or more
objects can be
objects can be
dis
dis
tin
tin
uis
uis
hed
hed
as
as
se
se
ara
ara
te
te.
.
--
Res
Res
olu
olu
tio
tio
n i
n i
s
s
the
the
ability
ability
of
of
a lens
a lens
to distinguish
to distinguish
at infinity, when they are
’
’
’
’
I
I
n
n
1
1
8
8
7
7
0
0
,
,
E
E
r
r
n
n
s
s
t
t
A
A
b
b
b
b
e
e
(
(
1
1
8
8
4
4
0
0
-
-
1
1
9
9
0
0
5
5
)
)
de
de
ri
ri
ve
ve
d
d
ma
ma
th
th
em
em
at
at
ic
ic
al
al
RP RP ≈≈ (1/2)(1/2)λ λe
e
x
x
p
p
r
r
e
e
s
s
s
s
i
i
o
o
n
n
f
f
o
o
r
r
r
r
e
e
s
s
o
o
l
l
u
u
t
t
i
i
o
o
n
n
o
o
f
f
m
m
i
i
c
c
r
r
o
o
s
s
c
c
o
o
p
p
e
e
:
:
Res
Res
olu
olu
tio
tio
n
n
is
is
limited to
limited to
≈ ≈0.5 the wavelength of illuminating source.
0.5 the wavelength of illuminating source.
,
,
RP
RP
= ---
=
---NA
NA
=
=
n.sin
n.sin
--
..-
-nn
-
-
ind
ind
ex of r
ex of r
efr
efr
act
act
ion
ion
α α-
-
half
half
angl
angl
e of
e of
illum
illum
inati
inati
on
on
i
i
n
n
c
c
r
r
e
e
a
a
s
s
i
i
n
n
g
g
t
t
h
h
e
e
h
h
a
a
l
l
f
f
a
a
n
n
g
g
l
l
e
e
o
o
f
f
i
i
l
l
l
l
u
u
m
m
i
i
n
n
a
a
t
t
i
i
o
o
n
n
,
,
b)
b)
in
in
cr
cr
e
e
as
as
in
in
g
g
th
th
e
e
re
re
f
f
ra
ra
ct
ct
iv
iv
e
e
i
i
n
n
d
d
e
e
x
x
o
o
f
f
t
t
h
h
e
e
l
l
e
e
n
n
s
s
b
b
y
y
u
u
s
s
i
i
n
n
g
g
C
C
r
r
o
o
w
w
n
n
g
g
l
l
a
a
s
s
s
s
,
,
a
a
n
n
d
d
c)
c)
d
d
e
e
c
c
r
r
e
e
a
a
s
s
i
i
n
n
g
g
t
t
h
h
e
e
.
.
Increase sin
Increase sin
α
α
d
d
e
e
cr
cr
. w
. w
o
o
rk
rk
in
in
d
d
i
i
s
s
ta
ta
n
n
c
c
e
e
i
i
n
n
cr
cr
. s
. s
i
i
z
z
e o
e o
f t
f t
h
h
e l
e l
e
e
n
n
s
s
:
:
Replacing visible light
Replacing visible light
Replacing visible light
Replacing visible light
by electron beam
by electron beam
by electron beam
e
e
s
s
m
m
a
a
e
e
s
s
t
t
s
s
t
t
a
a
n
n
c
c
e
e
e
e
tw
tw
e
e
e
e
n
n
t
t
w
w
o
o
p
p
o
o
n
n
t
t
s
s
t
t
a
a
t
t
c
c
a
a
n
n
e
e
resolved by
resolved by
u
u
m
m
a
a
n
n
e
e
y
y
e
e
:
:
.
.
-
-
.
.
m
m
m
m
Light
Light
microscope:
microscope:
0.2
0.2
μ
μ
m
m
SEM:
SEM:
1-2
1-2
nm
nm
TEM:
TEM:
2
2
Å
Å
This high resolution is achieved by TEM thanks to the
This high resolution is achieved by TEM thanks to the
use of a high energy electron beam (small wavelength).
e
e
w
w
n
n
g
g
o
o
p
p
o
o
n
n
s
s
e
e
w
w
n
n
g
g
o
o
p
p
o
o
n
n
s
s
Sample
Sample
thickness
thickness
Sample
Sample
environment
environment
Resolution
Resolution
[µm]
[µm]
Magnification
Magnification
Instrument
Instrument
c
c
r
r
ye
ye
Thick
Thick
Air
Air
15-100
15-100
2-10
2-10
Magnifying
Magnifying
glass
glass
Thick
Thick
Air or Oil
Air or Oil
0.2
0.2
200-1300
200-1300
Optical
Optical
microscope
microscope
c
c
acuum
acuum
.
.
-Electron
Electron
Electron-Electron-
-
-
dual (wave-
d
d
dual (wave-
u
u
a
a
l (
l (
w
w
a
a
v
v
e
e
-particle) character:
-particle) character:
particle) character:
particle) character:
Light particles
Light particles
Light particles
-Light particles -
-
-
Matter waves
Matter waves
M
M
a
a
t
t
t
t
e
e
r w
r w
a
a
v
v
e
e
s
s
Hermann Busch (1924):
Hermann Busch (1924):
Axial magnetic fields refract electrons
Axial magnetic fields refract electrons
h
h
-
-
Planc
Planc
k cons
k cons
tant
tant
(6.624
(6.624
X 10-27
X 10-27
erg/s
erg/s
)
)
v
v
-
-
ele
ele
ctr
ctr
on
on
vel
vel
oci
oci
ty
ty
(
(
p
p
=
=
mv
mv
: momentum)
: momentum)
V
V
-
-
acc
acc
ele
ele
rat
rat
ing
ing
vol
vol
tag
tag
e
e
m
m
oo-
-
res
res
t e
t e
lec
lec
tro
tro
n m
n m
ass
ass
≈
≈
1/2
1/2
e
e
r
r
o
o
g
g
e
e
r
r
e
e
a
a
t
t
o
o
n
n
s
s
p
p
e
e
r
r
o
o
g
g
e
e
r
r
e
e
a
a
t
t
o
o
n
n
s
s
p
p
Resolution limit of light microscope:
Resolution limit of light microscope:
--
c
c
a
a
n e
n e
c
c
r
r
e
e
a
a
s
s
e
e
o
o
nm
nm
--
n
n
.sin
.sin
α
α
is limited to
is limited to
≈
≈
1.6
1.6
--
Thu
Thu
s t
s t
he
he
ma
ma
xim
xim
um
um
res
res
ol
ol
uti
uti
on
on
is
is
abo
abo
ut
ut
200 nm
200 nm
e
e
s
s
o
o
u
u
o
o
n
n
o
o
m
m
c
c
r
r
o
o
s
s
c
c
o
o
p
p
e
e
s
s
e
e
s
s
o
o
u
u
o
o
n
n
o
o
m
m
c
c
r
r
o
o
s
s
c
c
o
o
p
p
e
e
s
s
