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Design of a Vertical Cavity Optical Micro-Electromechanical Filter

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Figure

Fig. 3 illustrates the tuning concept.   suspension    membrane
Fig. 2: FEM calculation results of the reflectivity of 2- and 3-period DBR mirrors. The results show a reflectivity of more than 99.9% for a DBR with only 3 periods
Fig. 5: Deflection vs gradient stress characteristics for various values of applied voltage

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