nanoimprint lithography
Nanoimprint lithography for nanodevice fabrication
9
Nanoimprint lithography for planar chiral photonic meta materials
6
Large scale fabrication of nanopatterned sapphire substrates by annealing of patterned Al thin films by soft UV nanoimprint lithography
6
Au nanostructure arrays for plasmonic applications: annealed island films versus nanoimprint lithography
9
Soft UV nanoimprint lithography designed highly sensitive substrates for SERS detection
6
Impact of Imprint Pressure on Residual Layer Thickness in UV Nanoimprint Lithography
5
A modified squeeze equation for predicting the filling ratio of nanoimprint lithography
7
Solvent immersion nanoimprint lithography of fluorescent conjugated polymers
6
Nanoimprint lithography - the past, the present and the future
33
A review of roll to roll nanoimprint lithography
13
Large Area CoNi Stress Free Electroformed Mold for Nanoimprint Lithography
24
Selective patterning of ZnO nanorods on silicon substrates using nanoimprint lithography
11
Development of Blue Laser Direct-Write Lithography System
9
Fabrication of flexible UV nanoimprint mold with fluorinated polymer coated PET film
5
A fast thermal curing nanoimprint resist based on cationic polymerizable epoxysiloxane
8
Characterization of polymer nanowires fabricated using the nanoimprint method
11
Fabrication of diffractive elements using matrix laser lithography
5
Evanescent wave assist features for optical projection lithography
194
Synthesis of low k1 projection lithography utilizing interferometry
95
Processes of Direct Laser Writing 3D Nano-Lithography
31