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Monolithic carbon structures including suspended single nanowires and nanomeshes as a sensor platform

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Figure 1 Schematic fabrication steps of suspended carbon nanostructures. (a) A bare silicon wafer, (b) insulation layer deposition,(c) spincoating SU-8, (d) UV exposure for carbon posts, (e) UV exposure for suspended carbon structures, (f) development, (g) pyrolysis.
Figure 2 SEM images of suspended SU-8 microwire structure, a corresponding carbon nanowire structure, and suspended carbonnanomesh
Figure 3 Scanning electron microscopy images of various types of suspended carbon nanomeshes
Figure 4 TEM image (a) and corresponding diffraction patterns (b) of a carbon nanowire and Raman spectrum from a carbon post (c).The TEM image was obtained at the edge of an approximately 190-nm-size bare carbon nanowire.
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