A
PPLIED
R
ESEARCH
C
ENTER
HIGH TECH SOLUTIONS
HIGH-TECH SOLUTIONS
NANOTECHNOLOGY
THIN FILM DEPOSITION
THIN FILM DEPOSITION
Applied Research Center
Frank Batten College of Engineering & Technology
Old Dominion University
Newport News, Virginia
MATERIALS
To be the leader in research,
development, and education,
concentrating on laser and
Mission
concentrating on laser and
plasma applications and
advanced materials.
Working to Innovate
What we are doing:
What we are doing:
¾
Nanotechnology/Quantum Dots
¾
Thin Films
¾
Materials Characterization
¾
Laser Micromachining
¾
Advanced Sensors
¾
Ultrafast Laser Diagnostics
¾
Nanotechnology for Lab-on-a-Chip Applications
¾
Electronic Materials
¾
High-k Dielectrics
¾
Alternative Renewable Energy and Bioapplications
¾
Electron Beam Lithography
¾
VUV Lithography
¾
Solar Cells and Photodetectory
y
¾
Negative Electron Affinity Photocathodes
g
y
¾
Laser Induced Breakdown Spectroscopy
¾
Femtosecond Laser Technology
¾
Carbon Nanotubes and Nanoparticles
¾
Surface Modification with Plasmas
In the Laboratory
ARC has established 18 labs with equipment and facilities
valued in excess of $6 million
LASERS
Amplified Femtosecond
Ti:Sapphire
High Power Diode
High Power UV
THIN FILM & NANO PARTICLE
FABRICATION
Atomic Layer Deposition (ALD)
Molecular Beam Epitaxy (MBE)
Pulsed Laser Deposition (PLD)
MATERIALS ANALYSIS
High Resolution Transmission
Electron Microscope (HRTEM)
Nano-Indentation
Scanning Electron Microscope
valued in excess of $6 million.
High Power UV
Q-Switched Nd:YAG
CW Nd:YAG
CO
2
Excimer
Pulsed Laser Deposition (PLD)
Multi-Target Sputtering
Laser Ablation
ECR Plasma Enhanced
Chemical Vapor Deposition
Electron Beam Evaporation
Scanning Electron Microscope
(SEM)
Probe Station for Electrical
Device Testing & Semiconductor
Device Analyzer
Optical Microscope
Argon Ion
Electron Beam Evaporation
Ultra High Vacuum Deposition
Plasma and Ion Beam
Deposition
Ion Beam Etching System
Electron Beam Lithography
Atomic Force Microscope (AFM)
Scanning Tunneling Microscope
(STM)
X-Ray Photoelectron
Spectroscope (XPS)
Time-Of-Flight Mass Spectrometer
(EBL)
Photolithography
Time-Of-Flight Mass Spectrometer
Raman & Optical
Spectrophotometer
RHEED intensity during growth of In-(4
×
3) film
Si(100)-(2×1)Si(100)-(2×1) In-(4In-(4××3)3)
Pulsed Laser Deposition (PLD) System
FABRICATION AND ANALYSIS
Femtosecond Laser n si ty (a rb . u n it ) 70 75 80 85 8.6 keV Specular peak [010] direction Stepper motor Target holder Electron gun CCD camera RGA RHEED screen e-beam Diffracted e-beam Species plume Focused laser beam Cracker source Half-wave Polarizer Time (s) 20 40 60 80 100 120 140 160 180 200 220 240 260 RH EE D i n te n 55 60 65 Laser on 52.4 nm 52.4 nm
InP on GaAs (100) by PLD
Femtosecond laser system Substrate holder RGA Pulse width = 130 fs λ= 800 nm Half wave plateNano-Indenter XP from MTS
A triangular Berkovich
diamond tip impression
52.4 nm 1.37 μm 0 0 52.4 nm 1.37 μm 0 0Probe Station and Agilent B1500A
Semiconductor Device Analyzer
Atomic Layer Deposition
(ALD) System
HfO
2Thin film on Si
by ALD
Scanning Probe
Microscope (SPM)
10 nm
HfO
2tube-in-tube structure by ALD
JEOL 2100 Field
Emission HRTEM
Carbon Nanotubes
JEOL 6060LV SEM Equipped
with Raith EBL System
Ag Nanoparticles by EBL
Ag
Nano-particles
y
Nanotechnology, Thin Film, and Laser Applications
Basic Sciences:
Self-assembled Quantum Dots, Phase Transitions, Interferometry,
,
,
y,
Atomic Cooling, Spectroscopy, Friction Reduction, Nanostructures,
Functionalization
Environmental:
Sensors and Detectors
Industrial:
Light Emitting Diodes (LED), Precision Cutting, Drilling, Hardening,
Marking, Engraving, Melting, Alloying, Cladding, Rapid Proto-typing,
Shock
Processing,
g,
Texturing,
g,
Forming,
g,
Annealing,
g,
Sintering,
g,
Adhesion, Stress Measurements, Fabrication of Functionalized
Nano-porous Membranes for Electro-osmotic Pumps, Synthesis of
Template Replicated ALD Grown Nanotubes for Sensor and Detector
Applications
Instrumentation:
Movement, Range Finder, Holography, Surveying, Photo-acoustics,
Thin Film Sensors, Lidars
Semiconductor:
Silicon-On
Insulator
(SOI)
Technology,
Strained
SOI,
III–V
Compound
Semiconductors
for
Opto-electronic
Applications,
Electron Beam Lithography, Thin Films, Crystallization, Surface
Cleaning, Annealing, Doping, Sensors, Photovoltaics, Adhesion,
Micromachining, High-k Dielectric Films by ALD for Advanced Gate
Stack Engineering, Si Ge Technology, Magnetic Semiconductors
Telecommunications:
Optical Storage, Laser Communications, Electro-Optic Devices
p
g ,
,
p
The ARC is in an excellent strategic position to accomplish its mission. It is only a few hours away
from Washington D.C., eight miles from NASA, surrounded by Department of Defense campuses
and within walking distance to the Jefferson National Accelerator Facility. Our many industry
partners are also within an hour’s drive from the facility.
What We Do
We offer research in laser, plasma, advanced materials research and technology conducted by
faculty and graduate students. We provide time and cost-saving technologies to our clients as
well as educational opportunities and state-of-the-art research experiences for students.
Dr. Hani E. Elsayed-Ali, Director
Applied Research Center, Old Dominion University
12050 Jefferson Avenue
Newport News, Virginia 23606
A Carnegie Doctoral / Research-Extensive Institution
Phone: (757) 269-5643
Fax: (757) 269-5644
E-mail: helsayed@odu.edu
Web site: http://www.eng.odu.edu/arc
FACULTY
Dr. Hani E. Elsayed-Ali, Professor of Electrical Engineering and Eminent Scholar, Director of Applied Research Center
Dr Elsayed Ali received his Ph D in Electrical Engineering from the University of Illinois Urbana in 1985 His current research interests are in Dr. Elsayed-Ali received his Ph.D. in Electrical Engineering from the University of Illinois-Urbana in 1985. His current research interests are in ultrafast laser-based measurements, laser processing, thin film and nanocrystal fabrication, pulsed laser deposition, semiconductor surface preparation and characterization, electron emitters and electron gun design, and thin film and laser-based sensors. He has authored and co-authored over 80 referred journal articles and holds two patents. He received the 16th Annual Research Award at ODU in 2000, the Excellence in Innovation in Hampton Roads Award from the Hampton Roads Technology Council in 2006, and the Excellence in Industrial Partnering from the Frank-Batten College of Engineering and Technology at ODU in 2008.
Dr. Helmut Baumgart, Virginia Microelectronics Consortium Endowed Chair, Department of Electrical and Computer Engineering
Professor Baumgart received his MS degree from Purdue University in Indiana, where he attended graduate school as a Fulbright Scholar, and his Ph.D. from the University of Stuttgart, Germany, while performing research at the Max-Planck Institute of Solid State Research in Stuttgart. He held numerous R&D positions in the microelectronics industry, including: AT&T Bell Laboratories in Murray Hill, New Jersey; Royal Philips Electronics Briarcliff Research Laboratories in New York; Royal Philips Electronics Research Headquarters at the Natuurkundig Laboratorium, Eindhoven, the Netherlands; IBM Microelectronics at the Advanced Semiconductor Technology Center (ASTC) in New York; Siemens Semiconductor Components; Infineon Technologies and Motorola Advanced Products Research & Development Laboratories (APRDL) in Austin, Texas. In his research areas he has authored and co-authored 76 papers; he has published and edited nine Electrochemical Society Conference Proceedings, delivered 46 conference presentations, including numerous invited talks, and has five U.S. Patents, four Japanese Patents, four European Patents and 15 Patent Disclosures.
Dr. Abdelmageed Elmustafa, Assistant Professor of Mechanical Engineering
Dr. Elmustafa received his Ph.D. in Materials Science and Engineering from the University of Wisconsin-Madison in 2000. Currently, Dr. Elmustafa is an Assistant Professor in the Department of Mechanical Engineering at Old Dominion University and a Visiting Research Professor in the Department of Mechanical and Aerospace Engineering at Princeton University. He has extensive experience in the nanoscale mechanical behavior of materials and nanotechnology. He has served as a technical reviewer for the National Science Foundation and as a reviewer for 18 referred journals. He holds a U.S. Provisional Patent on "Nanopositioners for Nano and Micro Scratch Test" and has authored more than 13 referred journal publications and over 16 conference proceedings and invited presentations
referred journal publications and over 16 conference proceedings and invited presentations.
Dr. Wes Lawrence, Assistant Professor of Engineering Technology
Dr. Lawrence received his Ph.D. in Electrical Engineering from North Carolina State University in 1992. He spent 25 years as a researcher at NASA’s Langley Research Center developing remote-sensing and materials technology. His present interests include the development of advanced material concepts that utilize nano-inclusions and periodic structures of materials to develop materials with novel electromagnetic properties. His research is focused on creating lightweight and flexible EM shielding materials, structurally integrated antenna concepts, and new sensor concepts. In addition, Dr. Lawrence is interested in the development of advanced microwave sensor concepts for Earth remote-sensing applications. His research includes the development of new instrument technology, including new antenna concepts and materials, as well as calibration approaches to enhance radiometric measurement capability and improved understanding of the Earth. He has contributed to several aircraft and spacecraft instrument development efforts and is presently interested in the development and characterization of materials for deployable antenna structures and calibration approaches for radiometric applications.
Dr. Sylvain Marsillac, Associate Professor of Electrical and Computer Engineering
Received his B.S. degree in physics and chemistry, his M.S. and his Ph.D. (1996) in Materials Science and Engineering all from the University of Nantes (France). After receiving his Ph.D., he worked for the University of Nantes until 2000 as an Assistant Professor. He
Dr. Gon Namkoong, Assistant Professor of Electrical Engineering
Dr. Gon Namkoong received his Ph.D. in the Department of Electrical and Computer Engineering at the Georgia Institute of Technology in 2003 Dr Namkoong joined the Faculty of the Department of Electrical and Computer Engineering at the ODU and ARC in 2007 His principal
then joined as a Researcher the University of Delaware and the University of Hawaii from 2000 to 2004. In 2005, he joined the University of Toledo where he became Associate Professor in 2008. He joined Old Dominion University in 2011. His current research interests include studying new inorganic materials for renewable energy applications, developing innovative tools for in-situ and real-time analysis, and developing novel architectures and techniques for the fabrication of flexible and high efficiency solar cells.
2003. Dr. Namkoong joined the Faculty of the Department of Electrical and Computer Engineering at the ODU and ARC in 2007. His principal interest is in the development of nitride/ZnO-based materials and devices on innovative substrate materials as well as applying new growth techniques to facilitate material and device improvements. Dr. Namkoong has been intimately involved in the creation of novel optoelectric/electronic devices and novel integration technologies to overcome current device performance limitations, allowing for new levels of multifunctional devices. He has authored/co-authored over 60 research papers/presentations as well as numerous technical reports and invention disclosures. Dr. Namkoong is currently a Member of IEEE and TMS.
