Scanning Electron Microscopy: an overview on application and perspective
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(2) Elvio Carlino - Centro Microscopia Elettronica. Location of the Center for Electron Microscopy (CME). Elettra Synchrotron. Fermi FEL. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012. IOM-CME.
(3) Elvio Carlino - Centro Microscopia Elettronica. TEM/STEM laboratory. Jeol JEM 2010F FEG UHR TEM/STEM:. 200 kV accelerating voltage. T. A. Field Emission Source ZrO/W[100]. Low Cs UHR pole-piece: (0.47 ±0.01) mm. Scherzer resolution: 0.19 nm. Minimum probe size: 0.125 nm. STEM B. F./HAADF detectors: resolution in zcontrast = 0.125 nm. Oxford Energy Dispersive x-ray Spectrometer (EDS) (Z≥5). 70 pm demonstrated by coherent electron diffraction imaging*. *L. De Caro, E. Carlino, G. Caputo, P. D. Cozzoli, C. Giannini. Electron diffractive imaging of oxygen atoms in nanocrystals at sub-ångström resolution. Nature Nano. 5 (2010) 360 Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(4) Elvio Carlino - Centro Microscopia Elettronica. Digital processing and simulation laboratory . Digital processing of TEM/STEM images: Digital Micrographs. Simulations of EDS and EELS spectra. Modelling and Simulations of HRTEM results:. JEMS; MacTempas; Kristal Kit. Phasing algorithm for coherent electron diffraction imaging*. Modelling and simulations of HAADF results based on parallel codes**. *L. De Caro, E. Carlino, G. Caputo, P. D. Cozzoli, C. Giannini. Electron diffractive imaging of oxygen atoms in nanocrystal at sub-Angstrom resolution. Nature Nano. 5 (2010) 360 . Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012. **E Carlino et al.: Accurate and Fast Multi-slice Simulations of HAADF Image Contrast by Parallel Computing. MSM 2007 - Springer Proceedings in Physics ISSN 0930-8989 V0l 120 pp 177-180 A. Cullis, P. Midgley Eds. . DOI: 10.1007/978-1-4020-8615-1_38 Springer Netherlands.
(5) Elvio Carlino - Centro Microscopia Elettronica. Diffraction limited resolution. R = 0.612 λ / n sinα. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(6) Elvio Carlino - Centro Microscopia Elettronica. Two ideas behind electron microscopy. Louis De Broglie [1] postulated on theoretical basis related to the symmetry of the h nature that to any particle is associated a wave:. λ= p. λ = h [ 2eVm0 (1 + eV/2m0c2) ] - 1/2. E = 200keV => λ = 2.507pm . E€= 30keV => λ = 6.977pm . Hans Bush [2] demonstrated that the magnetic field of a short solenoid acts on electrons in the same way as a convex glass lens acts on light. Ernst Ruska [3] made the hypothesis and demonstrated that a microscope using electrons instead of light photon was possible. [1] De Broglie L D 1925 Ann. Phys. Fr. 3 22. [2] Busch H 1926 Ann. Phys. Lpz. 81 974. [3] Ruska E and Knoll M 1931 Z. Tech. Phys. 12 389. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(7) Elvio Carlino - Centro Microscopia Elettronica. Microscopy by electrons: ingredients #1 = electrons. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(8) Elvio Carlino - Centro Microscopia Elettronica. Microscopy by electrons: ingredients #1 = electrons. Field Emission Gun (FEG). Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(9) Elvio Carlino - Centro Microscopia Elettronica. Features electron guns. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(10) Elvio Carlino - Centro Microscopia Elettronica. Microscopy by electrons: ingredient #2 = lens. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012. Busch H 1926 Ann. Phys. Lpz. 81 974.
(11) Elvio Carlino - Centro Microscopia Elettronica. Aberrations and resolutions with electron lenses. Electron lenses are extremely poor: if glass lenses were as bad, we should see as well with the naked eye as with a microscope! The demonstration by Otto Scherzer in 1936 that skilful lens design could never eliminate the spherical and chromatic aberrations of rotationally symmetric electron lenses was therefore most unwelcome and the other great electron optician of those years, Walter Glaser, never ceased striving to find a loophole in Scherzer’s proof. In the wartime and early post-war years, the first proposals for correcting Cs were made and in 1947, in a second milestone paper, Scherzer listed these and other ways of correcting lenses; soon after, Dennis Gabor invented holography for the same purpose. P. W. Hawkes - Phil. Trans. R. Soc A 28 Sept 2009 vol 367 n. 1903 3637-3664. Nominal image resolution at 20 kV = 1.5nm. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012. O. Scherzer, Z. Phys. 101(9–10) (1936) 593–603..
(12) Elvio Carlino - Centro Microscopia Elettronica. Electron-matter interactions. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(13) Elvio Carlino - Centro Microscopia Elettronica. Electron intensity distribution vs energy. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(14) Elvio Carlino - Centro Microscopia Elettronica. Image formation in SEM. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(15) Elvio Carlino - Centro Microscopia Elettronica. Cross section secondary electrons (SE). 4 3. nc e k F A QSE (ESE ) = 2 3πEρN 0 (ESE − EF ). Differential cross section of . low energy secondary electrons. QSE is in terms of secondary electrons per unit energy interval per incident electron per (atom/cm2). kF is the magnitude of the wave-vector corresponding to the Fermi energy EF. A is the atomic weight, . nc is the number of conduction-band electrons . ρ is the material density . ESE is the secondary electron energy. E is the beam energy. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(16) Elvio Carlino - Centro Microscopia Elettronica. Cross section back-scattered electrons (BSE). Rutheford differential cross section for elastic scattering vsscattering angle θ for a constant value of the electron energy E:. e 4 Z2 dΩ dQ(θ ) = 16(4πε 0 E) 2 [sin 2 (θ / 2) + θ 0 2 / 4)]2. dΩ = 2πsinθdθ e is the electronic charge. Z is the atomic number of the scattering atom. ε0 is the dielectric constant. (θ0/2)2 is the screening parameter. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012. Solid angle into which the electron of energy E is. scattered at an angle θ from its incident direction.
(17) Elvio Carlino - Centro Microscopia Elettronica. Signals generated by primary electrons. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(18) Elvio Carlino - Centro Microscopia Elettronica. Interaction volume. Auger. electrons. ≈ 1 nm. secondary. electrons. 5-50 nm. Secondary X-ray. fluorescence. Back-scattered. electrons. 1-2µm. Characteristic. X-ray. 2-5µm. bremsstrahlung. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(19) Elvio Carlino - Centro Microscopia Elettronica. Interaction volume vs HV&Z. Low Z. High Z. Tilt angle. Up: high accelerating voltage. Down: low accelerating voltage. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(20) Elvio Carlino - Centro Microscopia Elettronica. SE yeld vs thickness. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(21) Elvio Carlino - Centro Microscopia Elettronica. BSE coefficient vs Z. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(22) Elvio Carlino - Centro Microscopia Elettronica. Spatial distribution of the back-scattered electrons. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(23) Elvio Carlino - Centro Microscopia Elettronica. SE & BSE coefficients vs Z. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(24) Elvio Carlino - Centro Microscopia Elettronica. SE: surface and depth of field. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(25) Elvio Carlino - Centro Microscopia Elettronica. SE & BSE. Topography . Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012. Composition .
(26) Elvio Carlino - Centro Microscopia Elettronica. Tungsten with Titanium and Titanium Nitride. Al. Ti. W Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(27) Elvio Carlino - Centro Microscopia Elettronica. Example EBSD. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(28) Elvio Carlino - Centro Microscopia Elettronica. Low energy imaging of insulator. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(29) Elvio Carlino - Centro Microscopia Elettronica. Imaging at low energy HT. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(30) Elvio Carlino - Centro Microscopia Elettronica. Imaging at low energy HT. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(31) Elvio Carlino - Centro Microscopia Elettronica. Nanotubes. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(32) Elvio Carlino - Centro Microscopia Elettronica. http://l-esperimento-piu-bello-della-fisica.bo.imm.cnr.it/. American Journal of Physics 1976 . Physics world 2002 . Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(33) Elvio Carlino - Centro Microscopia Elettronica. STEM in SEM. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(34) Elvio Carlino - Centro Microscopia Elettronica. Set up for STEM imaging in SEM. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(35) Elvio Carlino - Centro Microscopia Elettronica. S(T)EM image. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(36) Elvio Carlino - Centro Microscopia Elettronica. S(T)EM in biology. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(37) Elvio Carlino - Centro Microscopia Elettronica. ???. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(38) Elvio Carlino - Centro Microscopia Elettronica. Lattice fringes by diffractive imaging in SEM. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(39) Elvio Carlino - Centro Microscopia Elettronica. Low voltage ~ 100 eV. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(40) Elvio Carlino - Centro Microscopia Elettronica. Summary. SEM is a powerful and flexible tool to study inorganic and organic matter at nanometer resolution, and more. In many cases the images reveals the specimen properties in an intuitive way giving access to quantitative morphology, crystal structure, chemistry, etc... It is worthwhile to underline how electron microscopy also represents a flexible tool that can be tuned to design new experiments to access subtle properties of the electron matter interaction paving the way to the knowledge of new science.. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
(41) Elvio Carlino - Centro Microscopia Elettronica. Nobody can resist to electron microscopy!. Dipartimento di Fisica-Universita’ di Perugia-20 Aprile 2012.
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