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high power impulse magnetron sputtering

Dynamic pressure measurements in high power impulse magnetron sputtering

Dynamic pressure measurements in high power impulse magnetron sputtering

... 40 Suggestions for further research This research has been a first attempt to measure dynamic pressure in high power impulse magnetron sputtering. Based on the fact that the outcome of ...
Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique

Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique

... reactive sputtering is well-known and has been studied in depth over the ...novel High Power Impulse Magnetron Sputtering (HIPIMS), which have highly ionized plasmas of the ...

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Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique

Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique

... reactive sputtering is well-known and has been studied in depth over the ...novel High Power Impulse Magnetron Sputtering (HIPIMS), which have highly ionized plasmas of the ...

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High power impulse magnetron sputtering discharges: Instabilities and plasma self organization

High power impulse magnetron sputtering discharges: Instabilities and plasma self organization

... in high power impulse magnetron sputtering plasmas which are likely to be of the generalized drift wave ...of high and low plasma emissivity along the racetrack of the ...

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Development of superlattice CrNNbN coatings for joint replacements deposited by High Power Impulse Magnetron Sputtering

Development of superlattice CrNNbN coatings for joint replacements deposited by High Power Impulse Magnetron Sputtering

... novel High Power Impulse Magnetron Sputtering technology, namely its unique highly ionised plasma were exploited to deposit dense and strongly adherent coatings on Co-Cr ...

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Effect of the degree of high power impulse magnetron sputtering utilisation on the structure and properties of TiN films

Effect of the degree of high power impulse magnetron sputtering utilisation on the structure and properties of TiN films

... Combining high power impulse magnetron sputtering with dc - unbalanced magnetron sputtering in one deposition process in a multiple source deposition system such as Hauzer ...

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Development of superlattice CrNNbN coatings for joint replacements deposited by High Power Impulse Magnetron Sputtering

Development of superlattice CrNNbN coatings for joint replacements deposited by High Power Impulse Magnetron Sputtering

... novel High Power Impulse Magnetron Sputtering technology, namely its unique highly ionised plasma were exploited to deposit dense and strongly adherent coatings on Co-Cr ...

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Antibacterial silver coating on poly(ethylene terephthalate) fabric by using high power impulse magnetron sputtering

Antibacterial silver coating on poly(ethylene terephthalate) fabric by using high power impulse magnetron sputtering

... terephthalate) High power impulse magnetron sputtering Silver Antibacterial silver coatings on textiles, formed by various coating processes, have attracted substantial ...by ...

8

Micro structural and functional properties of TiAlCN/VCN coating produced by High Power Impulse Magnetron Sputtering Technology

Micro structural and functional properties of TiAlCN/VCN coating produced by High Power Impulse Magnetron Sputtering Technology

... Based on this discharge principle, literature review was also carried out on most advanced ionised physical vapour deposition (DPVD) coating technologies; this includes Cathodic Arc, Unbalanced Magnetron ...

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Single-phase CZTS thin film prepared by high power impulse magnetron sputtering (HiPIMS): A first attempt

Single-phase CZTS thin film prepared by high power impulse magnetron sputtering (HiPIMS): A first attempt

... by high vapour pressures of sulphur and ...utilizing high power impulse magnetron sputtering is ideal for synthesizing CZTS thin ...in magnetron sputtering ...CZTS ...

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High-power Impulse Magnetron Sputtering

High-power Impulse Magnetron Sputtering

... Description of industry specific problem impact Analysis of industry specific financial market potential Potential companies Analyzed application fields build the foundation for an p[r] ...

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Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique

Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique

... constant power mode) is a direct result of continuously reducing sputtering yield owing to the formation of a compound which has a higher secondary electron emission ...

9

Plasma diagnosis of reactive high power impulse magnetron sputtering (HiPIMS) discharges

Plasma diagnosis of reactive high power impulse magnetron sputtering (HiPIMS) discharges

... 2.3 Magnetron discharge In diode sputtering, the pressure required to maintain a sufficiently dense plasma is com- parably high when compared to a magnetron sputtering ...a ...

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Invasive and non-invasive diagnostics of High Power Impulse Magnetron Sputtering (HiPIMS) discharges

Invasive and non-invasive diagnostics of High Power Impulse Magnetron Sputtering (HiPIMS) discharges

... 4.5 Chapter conclusions The temporal and spatial evolution of the plasma-induced emission studied by means of optical 2d-imaging gave an overview over phenomena present throughout the HiPIMS pulse and in the afterglow. ...

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Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology

Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology

... 2 Cross-sectional transmission electron microscopy revealed extremely dense coating structures at all bias voltages, similar to the transition zone structure (Zone T) reported by Thornton. The -95 bias voltage coatings ...

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High power impulse magnetron sputtering (HIPIMS) : Fundamental plasma studies and material synthesis

High power impulse magnetron sputtering (HIPIMS) : Fundamental plasma studies and material synthesis

... by high voltage positive polarity pulses, where the pulse amplitude in the cable is between 10 and 15 kV, duration at half-height is 25 ns, rise time of 5 ns and repetitive frequency around 40 ...constant ...

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ZrN coatings deposited by high power impulse magnetron sputtering and cathodic arc techniques

ZrN coatings deposited by high power impulse magnetron sputtering and cathodic arc techniques

... inherent high hardness, wear resistance, corrosion resistance and gold like colour have attracted many applications ranging from coatings for wear resistance, corrosion resistance, coatings for bio-medical ...

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Defect growth in multilayer chromium nitride/niobium nitride coatings produced by combined high power impulse magnetron sputtering and unbalance magnetron sputtering technique

Defect growth in multilayer chromium nitride/niobium nitride coatings produced by combined high power impulse magnetron sputtering and unbalance magnetron sputtering technique

... approaches. High-resolution scanning electron microscopy images revealed that HIPIMS/UBM and pure UBM CrN/NbN coatings have similar types of defects which could be categorised as: nodular, open void, cone-like and ...

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Defect growth in multilayer chromium nitride/niobium nitride coatings produced by combined high power impulse magnetron sputtering and unbalance magnetron sputtering technique

Defect growth in multilayer chromium nitride/niobium nitride coatings produced by combined high power impulse magnetron sputtering and unbalance magnetron sputtering technique

... approaches. High-resolution scanning electron microscopy images revealed that HIPIMS/UBM and pure UBM CrN/NbN coatings have similar types of defects which could be categorised as: nodular, open void, cone-like and ...

34

The use of segmented cathodes to determine the spoke current density distribution in high power impulse magnetron sputtering plasmas

The use of segmented cathodes to determine the spoke current density distribution in high power impulse magnetron sputtering plasmas

... Using a segmented target the current densities associated with rotating spokes in a HiPIMS 20. discharge have been investigated[r] ...

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