pulsed DC magnetron sputtering
Preparation of Thin Films by a Bipolar Pulsed DC Magnetron Sputtering System Using Ca3Co4O9 and CaMnO3 Targets
... evaporation sputtering and it is transported in the form of a vapor atomic beam through a vacuum to the ...substrate. Magnetron sput- tering is one of PVD methods, which are widely used in thin film ...of ...
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Pulsed DC magnetron sputtering deposition of crystalline photocatalytic titania coatings at elevated process pressures
... reactive magnetron sputtering. Variation of the other sputtering parameters (pulse frequency and duty cycle) allowed preliminary optimisation of deposition condition in order to produce anatase ...
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Single step deposition method for nearly stoichiometric CuInSe2 thin films
... This paper reports the production of high quality copper indium diselenide thin films using pulsed DC magnetron sputtering from a powder target. As grown thin films consisted of pin- hole ...
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Influence of power pulse parameters on the microstructure and properties of the AlCrN coatings by a modulated pulsed power magnetron sputtering
... traditional DC/pulse magnetron sputtering (DCMS/PMS) ...using magnetron sputtering usually exhibited a coarse columnar microstructure and low adhesion due to the low ionization rate of ...
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Advanced coatings through pulsed magnetron sputtering
... Pulsed magnetron sputtering (PMS) has become established as the process of choice for the deposition of dielectric materials for many ...the magnetron discharge also leads to hotter and more ...
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Electrical and Optical Properties of Fluorine Doped Tin Oxide Thin Films Prepared by Magnetron Sputtering
... of pulsed DC mode configuration during the sputtering of the oxide powder targets means there is no need for reactive process control equipment and no need for a RF matching ...
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Oxidation Resistance of CrAlN Films with Different Microstructures Prepared by Pulsed DC Balanced Magnetron Sputtering System
... the pulsed DC balanced magnetron sputtering system, CrAlN films with moderate hardness and a mixed structure of fcc- CrN and hcp-AlN ...
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Stationary and Pulsed Magnetron Sputtering Technologies for Protective/Catalyst Layer Production for PEM Systems
... protection. Magnetron sputtering technology is ecologically clean, has high ...coatings. DC magnetron sputtering with pulsed bias voltage applied to the Ti substrate is ...
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Hybrid HIPIMS and DC magnetron sputtering deposition of TiN coatings: Deposition rate, structure and tribological properties
... The deposition procedures started with ion etching on the samples using pulsed DC power applied to the substrates on their turntable with parameters of: frequency 350.0 kHz, pulse width 0.5 µs, and a high ...
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Highly (200)-Preferred Orientation TiN Thin Films Grown by DC Reactive Magnetron Sputtering
... [7] Tung Sheng Y, Jenn Ming W, Long Jang H, etal. “the proerties of TiN thin film deposited by pulsed direct current magnetron sputtering”. thin solid films, 2008, 516pp: 7294-7298. [8] Gaoling Zhao, ...
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SPUTTERING POWER DEPENDENCE PHYSICAL PROPERTIES OF NANOCRYSTALLINE DC MAGNETRON SPUTTERED SnO2 THIN FILMS
... [12], sputtering [13-15], plasma enhanced atomic layer deposition [16], and pulsed laser evaporation ...techniques DC reactive magnetron sputtering is one of the best technique, due to ...
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Pulsed DC reactive magnetron sputtering of aluminum nitride thin films
... Figure 3-19 shows the XRD results of the aluminum nitride thin films on Si (100) with variations of nitrogen content when a 100 kHz/80% duty cycle was used. Total sputtering pressure of argon and nitrogen mixture ...
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Magnetron Sputtering of Gadolinium-doped Ceria Electrolyte for Intermediate Temperature Solid Oxide Fuel Cells
... mm. Magnetron was connected to APEL-M-5PDC or APEL-M-HIPIMS power supply (Applied Electronics, ...in pulsed-DC or HiPIMS mode, ...the sputtering system was ...
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Annealing Effect on the Physical Properties of dc Reactive Magnetron Sputtered Nickel Oxide Thin Films
... Nickel Oxide (NiO) is usually taken as a model for p-type semiconductors and is an attractive material well known for its chemical stability, as well as for its excellent optical and electrical properties. It is a ...
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A Review on Characteristics of Titanium based Thin Films
... utilizing DC magnetron sputtering at steady gas stream rate and testimony ...utilizing DC magnetron sputtering framework at a steady gas flow rate and affidavit ...
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Effects of Vanadium Content on Structure and Chemical State of TiVN Films Prepared by Reactive DC Magnetron Co Sputtering
... be decomposed into four peaks while the N 1s could be decomposed into two peaks. These peaks were compared with standard XPS database obtained from Ref. [23] and corresponding chemical bonds were assigned. Table 5 shows ...
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The production and properties of TCO coatings prepared by pulsed magnetron sputtering from powder targets
... Therefore, the results of the resistivities of the coatings annealed in different atmosphere figure 8.8 may be explained as follows: the annealing process carried out under oxygen and ni[r] ...
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Study of Iridium (Ir) Thin Films Deposited on to SiO2 Substrates
... Ir films with extremely smooth surfaces (rms<1 nm. for most cases) were deposited by dc magnetron sputtering onto fused silica substrates at room temperature. Cr was employed as an intermediate ...
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Novel low temperature pulsed d c magnetron sputtering of single phase β In2S3 buffer layers for CIGS solar cell application
... magnetron sputtering of single phase β In2S3 buffer layers for CIGS solar cell application Karthikeyan, Sreejith, Hill, AE and Pilkington, RD.. Novel low temperature pulsed d.c.[r] ...
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Aluminum nitride deposition using an AlN/Al sputter cycle technique
... A method for forming thin films of dielectric material which exhibit improved quality and piezoelectric response, which are formed in a DC magnetron reactive sputtering system. The dielectric ...
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