[PDF] Top 20 Effect of the degree of high power impulse magnetron sputtering utilisation on the structure and properties of TiN films

... UBM sputtering the targets were operated with average power density of about ...whereas high peak power density of about ...average power in the range of 7 - 9 kW applied on all the ... See full document

... poisoning effect. When only one UBM target was operating target poison- ing effect was prominent between the flow rates of 80 and 170 ...poisoning effect was evident, however, expectedly moved to ... See full document

... apply magnetron sputtering to completely new ap- ...DC magnetron sputtering is the low degree of ionisation of the sputtered flux which limits this technology to mainly coating flat ... See full document

... inherent high hardness, wear resistance, corrosion resistance and gold like colour have attracted many applications ranging from coatings for wear resistance, corrosion resistance, coatings for bio-medical ... See full document

... Generally, structure and electrical qualities of films strongly depend on the deposition ...(DC) power and deposition time. DC power variation is an important factor to essentially control ... See full document

... The properties of these films are highly dependent on the technique of deposition and the substrate upon which they are ...[25]. Tin oxide (SnO 2 ) is an n-type ... See full document

... poisoning effect. When only one UBM target was operating target poisoning effect was prominent between the flow rates of 80 and 170 ...poisoning effect was evident however expectedly moved to higher ... See full document

... section structure: Figure 1 demonstrates the tremendous effect of the deposition technique on the surface ...the high melting point of Nb and the high vapour pressure and high ... See full document

... RF sputtering from solid metallic or ceramic targets, such as employing a closed field unbalanced magnetron configuration and pulsed sputtering to enhance the sputtering rate, benefit from low ... See full document

... the effect of a single column with large width; measuring in the range of 500 -700 ...dense structure is in contrast to that often observed for processes such as magnetron sputtering or ... See full document

... High power impulse magnetron sputtering (HIPIMS) has the advantage of ultra-dense plasma deposition environment although the resultant deposition rate is significantly ...unbalanced ... See full document

... Figures 3 (a) and (b) shows the change in transmittance spectrum of indium tin oxide thin film of different thicknesses before and after heat treatment respectively. The average transmittance for both graphs is ... See full document

... deposited films at different sputtering powers was listed in Table ...the films exhibited nearly stoichiometery (Sn/O ratio=0.52) at the films deposited at sputtering power of 40 ... See full document

... Nanocomposite films consisting of metal particles such as gold embedded in a silica matrix have recently been the subject of many studies ...2 films, such ion implantation ... See full document

... The adhesion force of the TiN/TiCN/TiC film was measured by means of scratch test. The test was conducted by CSM Revetest Scratch Tester in dry atmosphere condition with a progressive load sliding between 0-30 N ... See full document

... Effects of Titanium Sputtering Current on Structure and Morphology of TiZrN Films Prepared by Reactive DC Magnetron Co-Sputtering Somchai Chinsakolthanakorn1*, Adisorn Buranawong2, Suras[r] ... See full document

... by high voltage positive polarity pulses, where the pulse amplitude in the cable is between 10 and 15 kV, duration at half-height is 25 ns, rise time of 5 ns and repetitive frequency around 40 ...constant ... See full document

... Linear optical properties of the crystals were studied using a Shimadzu UV-Visible spectrophotometer. The UV-visible spectral analysis of KAP, cobalt doped and nickel doped KAP crystals were carried out covering ... See full document

... wavelength of 904 nm was applied for the active laser group for a period of 12 sessions and it was reported that low-power laser along with exercise can be followed by better pain reduction results [13]. In the ... See full document

... The degree of variation in the consistency characteristics of the soil depends on factors like type of soil, electrical charge of exchangeable cations absorbed by soil particles and concentration of cations in ... See full document