radio frequency magnetron sputtering
Substrate temperature dependent surface morphology and photoluminescence of germanium quantum dots grown by radio frequency magnetron sputtering
... Abstract: The visible luminescence from Ge nanoparticles and nanocrystallites has generated interest due to the feasibility of tuning band gap by controlling the sizes. Germanium (Ge) quantum dots (QDs) with average ...
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Properties of High Nitrogen Content Carbon Nitride Thin Films Prepared by a Radio Frequency Magnetron Sputtering Deposition Technique
... The aim of this thesis was to investigate in detail the properties of high nitrogen content amorphous carbon nitride films (CNx) prepared by a radio frequency (r.f) reactive [r] ...
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Structural and nanomechanical properties of BiFeO3 thin films deposited by radio frequency magnetron sputtering
... linear force that drives the motion of the indenter. The displacement response of the indenter at the excitation frequency and the phase angle between the force and displacement are measured continuously as a ...
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Structural and surface morphology of nanocystalline bismuth telluride thin films deposited using radio frequency magnetron sputtering
... 250°C to 400°C and gained thick layers of large poor oriented structures. Large grain of thin films may not suitable for micro-devices fabrication due to integration problem (Liao and She, 2007). Yuan et al demonstrated ...
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Degradation and characterization of resorbable phosphate based glass thin film coatings applied by radio frequency magnetron sputtering
... and B1: P28 distinct peaks associated with PO - were present at 575 cm -1 . Variation in the positioning of the absorption band reflects slight compositional variation between C2: P40 and B2: P40 as shown in Figure 5A. ...
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Plasma Spectroscopy Diagnostics of V2O5 at a Variable of Operating Power and Pressure With Radio Frequency Magnetron Sputtering.
... RF magnetron system (CRC600 CO. Manufactured in the USA). Films are placed on the glass base with changing powers. Glass slides were cleaned sequentially in the ultrasound course with ethanol and acetone. Finally, ...
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Silicon self-assembled nanodots fabricated using a radio-frequency magnetron sputtering method
... The self-assembly growth of silicon nanodots on sapphire substrate was investigated, with highlights on the very early stage of nucleation and the growth process.. The scope of study c[r] ...
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Electrochemical Capacitive Characteristics of TiO2 Coated on Vertically Aligned Carbon Nanotubes
... To enhance the specific capacitance of EDLC capacity, the rutile phase of TiO2 nanoparticles were deposited on VACNTs via radio-frequency magnetron sputtering method and resulted in incr[r] ...
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Effects of Vacuum Annealing on the Charge Discharge Characteristics of Eutectic Al Si/Al Thin Film as Anode Material for Li Ion Batteries
... study, radio frequency magnetron sputtering was used to prepare eutectic Al Si / Al bi-layered fi lms as anode materials and the effect of vacuum annealing in the charge discharge capacity ...
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Investigating optical properties of ITO thin film grown by RF sputtering
... Indium tin oxide (ITO) thin films of different thickness were successfully grown on the corning glass substrate using radio frequency magnetron sputtering technique. All the sample were ...
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Structural and optical properties of germanium nanostructures on Si(100) and embedded in high k oxides
... The structural and optical properties of Ge quantum dots (QDs) grown on Si(001) for mid-infrared photodetector and Ge nanocrystals embedded in oxide matrices for floating gate memory devices are presented. The infrared ...
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Influence of sputtering power on properties of titanium thin films deposited by RF magnetron sputtering
... by radio-frequency (RF) magnetron sputtering under various sputtering power (75-150W) at a relatively low temperature (200 ...of sputtering power on the structural, optical and ...
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Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum Scandium Thin Sheets
... During magnetron sputtering of the aluminum-scandium sheets a radio frequency bias voltage (13.56 MHz) was applied to the substrate. Five different bias voltages inthe range 0 V to -250 V were ...
5
Improvement of Photovoltaic Conversion Efficiency and also Photoluminescence Efficiency of p Cu2O/n ZnO thin film heterostructures by Cyanide Treatment
... This article reports fabrication of p-Cu2O/i-ZnO/n-ZnO thin film heterojunction photovoltaic structures by radio frequency dc magnetron sputtering technique and improvement of its quantu[r] ...
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Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique
... reactive sputtering is well-known and has been studied in depth over the ...Impulse Magnetron Sputtering (HIPIMS), which have highly ionized plasmas of the depositing species (metal and gas ions), ...
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Electrical Characteristics of Doped ZnO/Cu2O Heterojunction Diode by Sputtering Method
... using sputtering deposition method. The resistivity of both doped diodes Al:ZnO and Ga:ZnO was found to be lower than pure ZnO thin film. The present of dopant has increased the population of electrons ...
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Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering technique
... DC sputtering. 14 For example, when combined with DC-unbalanced magnetron sputtering (referred henceforth as UBM), HIPIMS can address some of the issues of deposition rates and can give a greater ...
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Micro structural and functional properties of TiAlCN/VCN coating produced by High Power Impulse Magnetron Sputtering Technology
... as, sputtering, ion plating, cathodic-arc PVD, pulsed laser deposition (PLD), ion- beam assisted deposition (IBAD), plasma enhanced CVD (PECVD), plasma enhanced PVD (PAPVD) have increased the production capability ...
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Deposition of Al/Cu Multilayer By Double Targets Cylindrical DC Magnetron Sputtering System
... current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been ...with magnetron configuration were sputtered simultaneously ...
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Advanced coatings through pulsed magnetron sputtering
... Pulsed magnetron sputtering (PMS) has become established as the process of choice for the deposition of dielectric materials for many ...the magnetron discharge also leads to hotter and more ...
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